Keyphrases
Comparison Experiment
14%
Distribution Mechanism
14%
Easy Installation
14%
Extraction Comparison
14%
Extraction System
14%
Feature Extraction
42%
Feature Extraction Methods
100%
Image Matching
14%
Intensity Distribution
14%
Interferometers-methods
28%
Laser Interferometer
28%
Machine Tool
28%
Measurement Algorithm
14%
Measurement Method
14%
Measurement Uncertainty
14%
Microstructural Characteristics
14%
Non-periodic
14%
Periodic Pattern
14%
Pixel Intensity
14%
Polar Microstructure
100%
Position Measurement
100%
Repeatability
100%
Repeatability Test
28%
Small Footprint
14%
Surface Topography
14%
Two-degree-of-freedom
14%
Vision-based
14%
Engineering
Experimental Result
20%
Extraction System
20%
Feature Extraction
100%
Image Matching
20%
Installation Cost
20%
Isolation Method
100%
Laser Interferometer
40%
Machine Tool
40%
Measurement Uncertainty
20%
Microscale
100%
Potential Application
40%
Repeatability
100%
Surface Topography
20%
Two Degree of Freedom
20%