Abstract
The YBa2Cu3O7-δsuperconducting thin films were deposited by the excimer laser scanning ablation, and then the devices were patterned by ion-beam etching. The detectors have a simple structure of microbridge with an area of 40 μm×100 μm. The optical response characteristics of the linear array detectors were investigated in the region of 8-14 μm. The average noise equivalent power of the arrays of 4.4×10-12WHz-1/2, the average detectivity (D*) of 1.44×109cmHz1/2W-1, and the non-unifority of D*being less than 10% were obtained. The measurement results show that the linear arrays have excellent uniformity and the process used is suitable for fabricating the uniform array detectors of high Tcsuperconducting thin films.
| Original language | English |
|---|---|
| Pages (from-to) | 451-455 |
| Number of pages | 5 |
| Journal | Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves |
| Volume | 14 |
| Issue number | 6 |
| Publication status | Published - 1 Dec 1995 |
| Externally published | Yes |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics