The YBa2Cu3O7-δsuperconducting thin films were deposited by the excimer laser scanning ablation, and then the devices were patterned by ion-beam etching. The detectors have a simple structure of microbridge with an area of 40 μm×100 μm. The optical response characteristics of the linear array detectors were investigated in the region of 8-14 μm. The average noise equivalent power of the arrays of 4.4×10-12WHz-1/2, the average detectivity (D*) of 1.44×109cmHz1/2W-1, and the non-unifority of D*being less than 10% were obtained. The measurement results show that the linear arrays have excellent uniformity and the process used is suitable for fabricating the uniform array detectors of high Tcsuperconducting thin films.
|Number of pages||5|
|Journal||Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves|
|Publication status||Published - 1 Dec 1995|
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics