Study on the linear array detectors of YBa2Cu3O7-δhigh-Tcsuperconducting thin films

Zhihong Mai; Xinrong Zhao; Fangqiao Zhou; Handong Sun; Jianhua Hao; Xinjian Yi

Study on the linear array detectors of YBa₂Cu₃O_7-δhigh-T_csuperconducting thin films

Zhihong Mai, Xinrong Zhao, Fangqiao Zhou, Handong Sun, Jianhua Hao, Xinjian Yi

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

The YBa2Cu3O7-δsuperconducting thin films were deposited by the excimer laser scanning ablation, and then the devices were patterned by ion-beam etching. The detectors have a simple structure of microbridge with an area of 40 μm×100 μm. The optical response characteristics of the linear array detectors were investigated in the region of 8-14 μm. The average noise equivalent power of the arrays of 4.4×10-12WHz-1/2, the average detectivity (D*) of 1.44×109cmHz1/2W-1, and the non-unifority of D*being less than 10% were obtained. The measurement results show that the linear arrays have excellent uniformity and the process used is suitable for fabricating the uniform array detectors of high Tcsuperconducting thin films.

Original language	English
Pages (from-to)	451-455
Number of pages	5
Journal	Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Volume	14
Issue number	6
Publication status	Published - 1 Dec 1995
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

Cite this

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title = "Study on the linear array detectors of YBa2Cu3O7-δhigh-Tcsuperconducting thin films",

abstract = "The YBa2Cu3O7-δsuperconducting thin films were deposited by the excimer laser scanning ablation, and then the devices were patterned by ion-beam etching. The detectors have a simple structure of microbridge with an area of 40 μm×100 μm. The optical response characteristics of the linear array detectors were investigated in the region of 8-14 μm. The average noise equivalent power of the arrays of 4.4×10-12WHz-1/2, the average detectivity (D*) of 1.44×109cmHz1/2W-1, and the non-unifority of D*being less than 10% were obtained. The measurement results show that the linear arrays have excellent uniformity and the process used is suitable for fabricating the uniform array detectors of high Tcsuperconducting thin films.",

author = "Zhihong Mai and Xinrong Zhao and Fangqiao Zhou and Handong Sun and Jianhua Hao and Xinjian Yi",

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T1 - Study on the linear array detectors of YBa2Cu3O7-δhigh-Tcsuperconducting thin films

AU - Mai, Zhihong

AU - Zhao, Xinrong

AU - Zhou, Fangqiao

AU - Sun, Handong

AU - Hao, Jianhua

AU - Yi, Xinjian

PY - 1995/12/1

Y1 - 1995/12/1

N2 - The YBa2Cu3O7-δsuperconducting thin films were deposited by the excimer laser scanning ablation, and then the devices were patterned by ion-beam etching. The detectors have a simple structure of microbridge with an area of 40 μm×100 μm. The optical response characteristics of the linear array detectors were investigated in the region of 8-14 μm. The average noise equivalent power of the arrays of 4.4×10-12WHz-1/2, the average detectivity (D*) of 1.44×109cmHz1/2W-1, and the non-unifority of D*being less than 10% were obtained. The measurement results show that the linear arrays have excellent uniformity and the process used is suitable for fabricating the uniform array detectors of high Tcsuperconducting thin films.

AB - The YBa2Cu3O7-δsuperconducting thin films were deposited by the excimer laser scanning ablation, and then the devices were patterned by ion-beam etching. The detectors have a simple structure of microbridge with an area of 40 μm×100 μm. The optical response characteristics of the linear array detectors were investigated in the region of 8-14 μm. The average noise equivalent power of the arrays of 4.4×10-12WHz-1/2, the average detectivity (D*) of 1.44×109cmHz1/2W-1, and the non-unifority of D*being less than 10% were obtained. The measurement results show that the linear arrays have excellent uniformity and the process used is suitable for fabricating the uniform array detectors of high Tcsuperconducting thin films.

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M3 - Journal article

SN - 1001-9014

VL - 14

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EP - 455

JO - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

JF - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

IS - 6

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Study on the linear array detectors of YBa₂Cu₃O_7-δhigh-T_csuperconducting thin films

Abstract

ASJC Scopus subject areas

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