Study on the linear array detectors of YBa2Cu3O7-δhigh-Tcsuperconducting thin films

Zhihong Mai, Xinrong Zhao, Fangqiao Zhou, Handong Sun, Jianhua Hao, Xinjian Yi

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Abstract

The YBa2Cu3O7-δsuperconducting thin films were deposited by the excimer laser scanning ablation, and then the devices were patterned by ion-beam etching. The detectors have a simple structure of microbridge with an area of 40 μm×100 μm. The optical response characteristics of the linear array detectors were investigated in the region of 8-14 μm. The average noise equivalent power of the arrays of 4.4×10-12WHz-1/2, the average detectivity (D*) of 1.44×109cmHz1/2W-1, and the non-unifority of D*being less than 10% were obtained. The measurement results show that the linear arrays have excellent uniformity and the process used is suitable for fabricating the uniform array detectors of high Tcsuperconducting thin films.
Original languageEnglish
Pages (from-to)451-455
Number of pages5
JournalHongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Volume14
Issue number6
Publication statusPublished - 1 Dec 1995
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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