Study on self-standing soft X-ray pinhole transmission gratings

Shaojun Fu, Yilin Hong, Xiaoming Tao

Research output: Journal article publicationJournal articleAcademic researchpeer-review


Self-standing soft X-ray pinhole transmission grating has both spectral resolution capability and spatial resolution capability, and its range of operating waveband is improved because it has no substrate absorption. In this study, two kinds of self-standing soft X-ray pinhole transmission gratings, respectively 25μm and 50μm in diameter, were developed by ion-beam etching and micro-coating. The line density of the grating is 1000 line/mm. The golden grating is more than 0.5μm thick. The preparation technique was introduced in this paper.

Original languageEnglish
Number of pages1
JournalGuangxue Xuebao/Acta Optica Sinica
Issue number1
Publication statusPublished - 1 Jan 1994

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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