Study on self-standing soft X-ray pinhole transmission gratings

Shaojun Fu, Yilin Hong, Xiaoming Tao

    Research output: Journal article publicationJournal articleAcademic researchpeer-review

    Abstract

    Self-standing soft X-ray pinhole transmission grating has both spectral resolution capability and spatial resolution capability, and its range of operating waveband is improved because it has no substrate absorption. In this study, two kinds of self-standing soft X-ray pinhole transmission gratings, respectively 25μm and 50μm in diameter, were developed by ion-beam etching and micro-coating. The line density of the grating is 1000 line/mm. The golden grating is more than 0.5μm thick. The preparation technique was introduced in this paper.

    Original languageEnglish
    Number of pages1
    JournalGuangxue Xuebao/Acta Optica Sinica
    Volume14
    Issue number1
    Publication statusPublished - 1 Jan 1994

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics

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