Self-standing soft X-ray pinhole transmission grating has both spectral resolution capability and spatial resolution capability, and its range of operating waveband is improved because it has no substrate absorption. In this study, two kinds of self-standing soft X-ray pinhole transmission gratings, respectively 25μm and 50μm in diameter, were developed by ion-beam etching and micro-coating. The line density of the grating is 1000 line/mm. The golden grating is more than 0.5μm thick. The preparation technique was introduced in this paper.
|Number of pages||1|
|Journal||Guangxue Xuebao/Acta Optica Sinica|
|Publication status||Published - 1 Jan 1994|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics