| Original language | English |
|---|---|
| Pages (from-to) | 14 |
| Number of pages | 1 |
| Journal | Weixi Jiagong Jishu/Microfabrication Technology |
| Issue number | 3 |
| Publication status | Published - Sept 2001 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering