Original language | English |
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Pages (from-to) | 14 |
Number of pages | 1 |
Journal | Weixi Jiagong Jishu/Microfabrication Technology |
Issue number | 3 |
Publication status | Published - Sept 2001 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering