Study on fabrication of Fresnel zone plate by LIGA technique

Yilin Hong; Yangchao Tian; Gang Liu; Shaojun Fu; Yiguan Hu; Tonglin Huo; Xiaoming Tao; Ya Kan

Study on fabrication of Fresnel zone plate by LIGA technique

Yilin Hong, Yangchao Tian, Gang Liu, Shaojun Fu, Yiguan Hu, Tonglin Huo, Xiaoming Tao, Ya Kan

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

This paper described the fabrication of Fresnel zone plate with zone plate coded imaging of α particle using LIGA technique which is the combination of deep lithography, electroforming and molding. The structure and parameters affecting the resolution of the imaging were investigated. The design parameters were given.

Original language	English
Pages (from-to)	62-67
Number of pages	6
Journal	Weixi Jiagong Jishu/Microfabrication Technology
Issue number	1
Publication status	Published - 1 Jan 1999
Externally published	Yes

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

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title = "Study on fabrication of Fresnel zone plate by LIGA technique",

abstract = "This paper described the fabrication of Fresnel zone plate with zone plate coded imaging of α particle using LIGA technique which is the combination of deep lithography, electroforming and molding. The structure and parameters affecting the resolution of the imaging were investigated. The design parameters were given.",

author = "Yilin Hong and Yangchao Tian and Gang Liu and Shaojun Fu and Yiguan Hu and Tonglin Huo and Xiaoming Tao and Ya Kan",

year = "1999",

month = jan,

day = "1",

language = "English",

pages = "62--67",

journal = "Weixi Jiagong Jishu/Microfabrication Technology",

issn = "1003-8213",

publisher = "Weixi Jiagong Jishu",

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TY - JOUR

T1 - Study on fabrication of Fresnel zone plate by LIGA technique

AU - Hong, Yilin

AU - Tian, Yangchao

AU - Liu, Gang

AU - Fu, Shaojun

AU - Hu, Yiguan

AU - Huo, Tonglin

AU - Tao, Xiaoming

AU - Kan, Ya

PY - 1999/1/1

Y1 - 1999/1/1

N2 - This paper described the fabrication of Fresnel zone plate with zone plate coded imaging of α particle using LIGA technique which is the combination of deep lithography, electroforming and molding. The structure and parameters affecting the resolution of the imaging were investigated. The design parameters were given.

AB - This paper described the fabrication of Fresnel zone plate with zone plate coded imaging of α particle using LIGA technique which is the combination of deep lithography, electroforming and molding. The structure and parameters affecting the resolution of the imaging were investigated. The design parameters were given.

UR - http://www.scopus.com/inward/record.url?scp=0032684990&partnerID=8YFLogxK

M3 - Journal article

SN - 1003-8213

SP - 62

EP - 67

JO - Weixi Jiagong Jishu/Microfabrication Technology

JF - Weixi Jiagong Jishu/Microfabrication Technology

IS - 1

ER -

Study on fabrication of Fresnel zone plate by LIGA technique

Abstract

ASJC Scopus subject areas

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