This paper described the fabrication of Fresnel zone plate with zone plate coded imaging of α particle using LIGA technique which is the combination of deep lithography, electroforming and molding. The structure and parameters affecting the resolution of the imaging were investigated. The design parameters were given.
|Number of pages||6|
|Journal||Weixi Jiagong Jishu/Microfabrication Technology|
|Publication status||Published - 1 Jan 1999|
ASJC Scopus subject areas
- Electrical and Electronic Engineering