Study on fabrication of Fresnel zone plate by LIGA technique

Yilin Hong, Yangchao Tian, Gang Liu, Shaojun Fu, Yiguan Hu, Tonglin Huo, Xiaoming Tao, Ya Kan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

1 Citation (Scopus)

Abstract

This paper described the fabrication of Fresnel zone plate with zone plate coded imaging of α particle using LIGA technique which is the combination of deep lithography, electroforming and molding. The structure and parameters affecting the resolution of the imaging were investigated. The design parameters were given.
Original languageEnglish
Pages (from-to)62-67
Number of pages6
JournalWeixi Jiagong Jishu/Microfabrication Technology
Issue number1
Publication statusPublished - 1 Jan 1999
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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