Study of ultra-precision diamond turning of a microlens array with a fast tool servo system

Suet To, T. C. Kwok, Chi Fai Cheung, Wing Bun Lee

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

23 Citations (Scopus)

Abstract

A Microlens array is a critical component for optimizing display functions. With the increasing usage of display systems in photonic products nowadays, more attention is being paid to the research and development of fabrication technology for microlens arrays. Ultra-precision machining with a fast tool servo (FTS) is one of the leading methodologies for fabrication of high-quality optical micro structural surfaces. FTS is an independently operated positioning device, which provides an indispensable solution for machining optical microstructures with sub-micrometer form accuracy and nanometric surface finish, without the need for any subsequent post processing. The surface quality of an FTS machined surface depends largely on the selection of cutting conditions. However, the achievement of ultra-precision surface finishing depends greatly on the experience and skill of the machine operators. Determination of optimal cutting conditions can stabilize the quality of the fabricated microlens array. In this paper, the effect of cutting conditions such as depth of cut, feed rate, spindle speed and surface speed are investigated; and optimal surface roughness and surface profiles in ultra-precision machining with FTS can be observed.
Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume6149
DOIs
Publication statusPublished - 15 May 2006
Event2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies - Advanced Optical Manufacturing and Testing Technologies - Xian, China
Duration: 2 Nov 20055 Nov 2005

Conference

Conference2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies - Advanced Optical Manufacturing and Testing Technologies
CountryChina
CityXian
Period2/11/055/11/05

Keywords

  • Fast Tool Servo
  • Microlens array
  • Surface roughness
  • Ultra-precision machining

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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