Study of the surface layer in cBN growth by PVD techniques

Q. Li, S. F. Wong, W. M. Lau, Chung Wo Ong

Research output: Journal article publicationJournal articleAcademic researchpeer-review

7 Citations (Scopus)

Abstract

A sp2bonded boron nitride (sp2BN) surface layer is sometimes observed on top of cubic boron nitride (cBN) grains for BN films deposited using ion-assisted PVD techniques. Understanding the formation of such surface layer gives a clue to the cBN growth mechanisms. In the current study, the microstructure and phase composition near the top surface of several BN films were investigated in order to clarify the formation mechanism of such a surface layer. All the films investigated were synthesized using ion-assisted PVD techniques, but with different deposition parameters. It was found that such a surface layer is not necessarily present in some of the cBN growth, and its presence depends on the bombardment of ion energy during deposition. The cBN growth mechanisms are discussed based on these observations.
Original languageEnglish
Pages (from-to)421-424
Number of pages4
JournalDiamond and Related Materials
Volume16
Issue number3
DOIs
Publication statusPublished - 1 Mar 2007

Keywords

  • Cubic boron nitride
  • Growth mechanisms
  • Ion-assisted PVD techniques
  • sp bonded boron nitride surface layer 2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this