Study of the surface layer in cBN growth by PVD techniques

Q. Li; S. F. Wong; W. M. Lau; Chung Wo Ong

doi:10.1016/j.diamond.2006.08.020

Study of the surface layer in cBN growth by PVD techniques

Q. Li, S. F. Wong, W. M. Lau, Chung Wo Ong

Research output: Journal article publication › Journal article › Academic research › peer-review

9 Citations (Scopus)

Abstract

A sp2bonded boron nitride (sp2BN) surface layer is sometimes observed on top of cubic boron nitride (cBN) grains for BN films deposited using ion-assisted PVD techniques. Understanding the formation of such surface layer gives a clue to the cBN growth mechanisms. In the current study, the microstructure and phase composition near the top surface of several BN films were investigated in order to clarify the formation mechanism of such a surface layer. All the films investigated were synthesized using ion-assisted PVD techniques, but with different deposition parameters. It was found that such a surface layer is not necessarily present in some of the cBN growth, and its presence depends on the bombardment of ion energy during deposition. The cBN growth mechanisms are discussed based on these observations.

Original language	English
Pages (from-to)	421-424
Number of pages	4
Journal	Diamond and Related Materials
Volume	16
Issue number	3
DOIs	https://doi.org/10.1016/j.diamond.2006.08.020
Publication status	Published - 1 Mar 2007

Keywords

Cubic boron nitride
Growth mechanisms
Ion-assisted PVD techniques
sp bonded boron nitride surface layer 2

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Materials Chemistry
Surfaces, Coatings and Films
Surfaces and Interfaces

More information

10.1016/j.diamond.2006.08.020

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title = "Study of the surface layer in cBN growth by PVD techniques",

abstract = "A sp2bonded boron nitride (sp2BN) surface layer is sometimes observed on top of cubic boron nitride (cBN) grains for BN films deposited using ion-assisted PVD techniques. Understanding the formation of such surface layer gives a clue to the cBN growth mechanisms. In the current study, the microstructure and phase composition near the top surface of several BN films were investigated in order to clarify the formation mechanism of such a surface layer. All the films investigated were synthesized using ion-assisted PVD techniques, but with different deposition parameters. It was found that such a surface layer is not necessarily present in some of the cBN growth, and its presence depends on the bombardment of ion energy during deposition. The cBN growth mechanisms are discussed based on these observations.",

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AU - Li, Q.

AU - Wong, S. F.

AU - Lau, W. M.

AU - Ong, Chung Wo

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Y1 - 2007/3/1

N2 - A sp2bonded boron nitride (sp2BN) surface layer is sometimes observed on top of cubic boron nitride (cBN) grains for BN films deposited using ion-assisted PVD techniques. Understanding the formation of such surface layer gives a clue to the cBN growth mechanisms. In the current study, the microstructure and phase composition near the top surface of several BN films were investigated in order to clarify the formation mechanism of such a surface layer. All the films investigated were synthesized using ion-assisted PVD techniques, but with different deposition parameters. It was found that such a surface layer is not necessarily present in some of the cBN growth, and its presence depends on the bombardment of ion energy during deposition. The cBN growth mechanisms are discussed based on these observations.

AB - A sp2bonded boron nitride (sp2BN) surface layer is sometimes observed on top of cubic boron nitride (cBN) grains for BN films deposited using ion-assisted PVD techniques. Understanding the formation of such surface layer gives a clue to the cBN growth mechanisms. In the current study, the microstructure and phase composition near the top surface of several BN films were investigated in order to clarify the formation mechanism of such a surface layer. All the films investigated were synthesized using ion-assisted PVD techniques, but with different deposition parameters. It was found that such a surface layer is not necessarily present in some of the cBN growth, and its presence depends on the bombardment of ion energy during deposition. The cBN growth mechanisms are discussed based on these observations.

KW - Cubic boron nitride

KW - Growth mechanisms

KW - Ion-assisted PVD techniques

KW - sp bonded boron nitride surface layer 2

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DO - 10.1016/j.diamond.2006.08.020

M3 - Journal article

SN - 0925-9635

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SP - 421

EP - 424

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 3

ER -

Study of the surface layer in cBN growth by PVD techniques

Abstract

Keywords

ASJC Scopus subject areas

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