Keyphrases
Mechanical Properties
100%
Tetrahedral Amorphous Carbon Film
100%
Mechanical Stress
100%
Morphological Structure
33%
High Stress
33%
Atomic Force Microscopy
33%
Arc Technique
33%
Filtered Cathodic Vacuum Arc
33%
Young's Modulus
33%
Nanoindentation
33%
Surface Profilometry
33%
Low Stress
33%
Surface Morphology
33%
Raman Spectroscopy
33%
High Hardness
33%
Substrate Pulse
33%
Structure Stress
33%
Pulsed Bias
33%
Pulsed Bias Voltage
33%
Nanoindention
33%
Reduced Young's Modulus
33%
Material Science
Tetrahedral Amorphous Carbon
100%
Carbon Films
100%
Young's Modulus
66%
Film
66%
Raman Spectroscopy
33%
Nanoindentation
33%
Surface Morphology
33%
Surface (Surface Science)
33%
Engineering
Tetrahedral Amorphous Carbon
100%
Young's Modulus
66%
Bias Voltage
33%
Structure Stress
33%
Atomic Force Microscopy
33%
Surface Morphology
33%
Physics
Young's Modulus
100%
Nanoindentation
50%
Raman Spectroscopy
50%
Atomic Force Microscopy
50%