Study of air-driving fluid jet polishing

Zong Ru Yu, Ching Hsiang Kuo, Chun Cheng Chen, Wei Yao Hsu, Din Ping Tsai

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

13 Citations (Scopus)


In this study, we proposed an air-driving fluid jet polishing (FJP) system which draws slurry utilizing an air/water mixer. The air-driving FJP system is mainly comprised by an air/water mixer, slurry tank with stirrer, compressed air, pressure and flow rate regulators, and a nozzle. The high speed air flow in the air/water mixer draws out the slurry from the slurry tank, and the slurry is guided to mix with air flow inside the nozzle cavity. Then, the combined fluid slurry is emitted from the nozzle. The air-driving FJP system was preliminarily tested on N-BK7 and ZERODUR® plates with different air pressure and processing time. The test results show that the air-driving system could get a Gaussian-like removal shape with 3 kg/cm2 compressed air source and the depth of removal is about 100 nm within 5 seconds processing time. The compressed air improves the kinetic energy of each abrasive, and makes it more efficient in material removal. Furthermore, the Gaussian-like removal shape is more convenient for tool path planning and surface waviness control of corrective polishing.

Original languageEnglish
Title of host publicationOptical Manufacturing and Testing IX
Publication statusPublished - Aug 2011
Externally publishedYes
EventOptical Manufacturing and Testing IX - San Diego, CA, United States
Duration: 22 Aug 201124 Aug 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceOptical Manufacturing and Testing IX
Country/TerritoryUnited States
CitySan Diego, CA


  • Fluid jet polishing
  • Gaussian-like removal shape

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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