Structure improvement of an XY flexure micromanipulator for micro/nano scale manipulation

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

8 Citations (Scopus)

Abstract

An effort made towards the performance improvement for an XY micromanipulator featuring parallel architecture and flexure hinges has been presented in this paper. Through the implementation of four steps evolution of the original structure, a new manipulator with decoupled motion is finally obtained, which owns an enlarged workspace and eliminated stiffening and buckling phenomena. The merits of the new manipulator have been illustrated via the finite element analysis performed via ANSYS software package. It is believed that the generated flexure micromanipulator can be adopted in the applications involving manipulation of objects in micro- and nano-meter scales.
Original languageEnglish
Title of host publicationProceedings of the 17th World Congress, International Federation of Automatic Control, IFAC
Volume17
Edition1 PART 1
DOIs
Publication statusPublished - 1 Dec 2008
Event17th World Congress, International Federation of Automatic Control, IFAC - Seoul, Korea, Republic of
Duration: 6 Jul 200811 Jul 2008

Conference

Conference17th World Congress, International Federation of Automatic Control, IFAC
CountryKorea, Republic of
CitySeoul
Period6/07/0811/07/08

Keywords

  • Microsystems: nano- and micro-technologies
  • Robotics technology

ASJC Scopus subject areas

  • Control and Systems Engineering

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