Structure improvement of an XY flexure micromanipulator for micro/nano scale manipulation

Qingsong Xu; Yangmin Li

doi:10.3182/20080706-5-KR-1001.0743

Structure improvement of an XY flexure micromanipulator for micro/nano scale manipulation

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

8 Citations (Scopus)

Abstract

An effort made towards the performance improvement for an XY micromanipulator featuring parallel architecture and flexure hinges has been presented in this paper. Through the implementation of four steps evolution of the original structure, a new manipulator with decoupled motion is finally obtained, which owns an enlarged workspace and eliminated stiffening and buckling phenomena. The merits of the new manipulator have been illustrated via the finite element analysis performed via ANSYS software package. It is believed that the generated flexure micromanipulator can be adopted in the applications involving manipulation of objects in micro- and nano-meter scales.

Original language	English
Title of host publication	Proceedings of the 17th World Congress, International Federation of Automatic Control, IFAC
Volume	17
Edition	1 PART 1
DOIs	https://doi.org/10.3182/20080706-5-KR-1001.0743
Publication status	Published - 1 Dec 2008
Event	17th World Congress, International Federation of Automatic Control, IFAC - Seoul, Korea, Republic of Duration: 6 Jul 2008 → 11 Jul 2008

Conference

Conference	17th World Congress, International Federation of Automatic Control, IFAC
Country/Territory	Korea, Republic of
City	Seoul
Period	6/07/08 → 11/07/08

Keywords

Microsystems: nano- and micro-technologies
Robotics technology

ASJC Scopus subject areas

Control and Systems Engineering

More information

10.3182/20080706-5-KR-1001.0743

Cite this

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title = "Structure improvement of an XY flexure micromanipulator for micro/nano scale manipulation",

abstract = "An effort made towards the performance improvement for an XY micromanipulator featuring parallel architecture and flexure hinges has been presented in this paper. Through the implementation of four steps evolution of the original structure, a new manipulator with decoupled motion is finally obtained, which owns an enlarged workspace and eliminated stiffening and buckling phenomena. The merits of the new manipulator have been illustrated via the finite element analysis performed via ANSYS software package. It is believed that the generated flexure micromanipulator can be adopted in the applications involving manipulation of objects in micro- and nano-meter scales.",

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Xu, Q & Li, Y 2008, Structure improvement of an XY flexure micromanipulator for micro/nano scale manipulation. in Proceedings of the 17th World Congress, International Federation of Automatic Control, IFAC. 1 PART 1 edn, vol. 17, 17th World Congress, International Federation of Automatic Control, IFAC, Seoul, Korea, Republic of, 6/07/08. https://doi.org/10.3182/20080706-5-KR-1001.0743

Structure improvement of an XY flexure micromanipulator for micro/nano scale manipulation. / Xu, Qingsong; Li, Yangmin.
Proceedings of the 17th World Congress, International Federation of Automatic Control, IFAC. Vol. 17 1 PART 1. ed. 2008.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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BT - Proceedings of the 17th World Congress, International Federation of Automatic Control, IFAC

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Structure improvement of an XY flexure micromanipulator for micro/nano scale manipulation

Abstract

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Keywords

ASJC Scopus subject areas

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