Structural studies of reactive pulsed laser-deposited CNxfilms by X-ray photoelectron spectroscopy and infrared absorption

Chung Wo Ong, X. A. Zhao, Y. C. Tsang, C. L. Choy, P. W. Chan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

26 Citations (Scopus)


The changes in the structure of reactive pulsed laser-deposited (RPLD) CNxfilms with nitrogen content from 3.6-22 at% have been investigated by X-ray diffraction, X-ray photoelectron spectroscopy (XPS) and Fourier transform-infrared (FT-IR) absorption. The films were found to be amorphous, and to consist of a network of rings. The rings that were composed solely of carbon atoms gave rise to an XPS peak located between 284.3 and 284.SeV (C1component). The rings containing nitrogen led to another peak located between 285.5 and 286.4eV (C2component). When the nitrogen content increased, the relative intensity of the C1component fell, while that of the C2component rose, indicating that some carbon atoms in the rings were replaced by nitrogen atoms. C≡N bonds also contributed to the C2component. The FT-IR data were consistent with this interpretation. No evidence for the existence of a β-C3N4phase was found in RPLD CNxfilms.
Original languageEnglish
Pages (from-to)2347-2352
Number of pages6
JournalJournal of Materials Science
Issue number9
Publication statusPublished - 1 Jan 1997

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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