Structural properties and nanoindentation of AlN films by a filtered cathodic vacuum arc at low temperature

X. H. Ji, Shu Ping Lau, G. Q. Yu, W. H. Zhong, B. K. Tay

Research output: Journal article publicationJournal articleAcademic researchpeer-review

31 Citations (Scopus)

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Material Science

Engineering

Physics