Structural and optical properties of ZnO thin films produced by filtered cathodic vacuum arc

X. L. Xu, Shu Ping Lau, B. K. Tay

Research output: Journal article publicationConference articleAcademic researchpeer-review

55 Citations (Scopus)


Polycrystalline ZnO films have been deposited by filtered cathodic vacuum arc with various substrate temperatures and bias voltages. The films deposited at room temperature are amorphous. The films grown at 230 and 430°C oriented in the (002) and (103) directions. Strong near-band edge room temperature photoluminescence emission has been observed in the film deposited at 230°C under floating bias. This is attributed to the reduced oxygen vacancies as determined by Raman spectroscopy. The bias voltage and high substrate temperature (up to 430°C) will induce more defects, resulting in broad band tails near the band edge. The optimized ZnO film has a transmittance which is over 80%.
Original languageEnglish
Pages (from-to)244-249
Number of pages6
JournalThin Solid Films
Publication statusPublished - 1 Nov 2001
Externally publishedYes
Event28th International Conference on Metallurgia - San Diego,CA, United States
Duration: 30 Apr 200130 May 2001


  • Filtered cathodic vacuum arc
  • X-Ray diffraction
  • Zinc oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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