Structural and optical properties of wurtzite InN grown on Si(111)

X. H. Ji; Shu Ping Lau; H. Y. Yang; Q. Y. Zhang

doi:10.1016/j.tsf.2006.11.046

Structural and optical properties of wurtzite InN grown on Si(111)

X. H. Ji, Shu Ping Lau, H. Y. Yang, Q. Y. Zhang

Research output: Journal article publication › Journal article › Academic research › peer-review

21 Citations (Scopus)

Abstract

We report the structural and optical properties of InN films on Si(111) prepared by ion-beam-assisted filtered cathodic vacuum arc technique. X-ray diffraction and Raman spectroscopy measurements indicated that all the InN films were hexagonal crystalline InN. The InN films deposited at substrate temperature of 475 °C exhibited highly (0001) preferred orientation and texturing (cratered) surface morphology. The oxygen incorporated in the InN films was segregated in the form of amorphous indium oxide or oxynitride phases at the grain boundaries. Photoluminescence emission of ∼ 1.15 eV was observed at room temperature from the InN films.

Original language	English
Pages (from-to)	4619-4623
Number of pages	5
Journal	Thin Solid Films
Volume	515
Issue number	11
DOIs	https://doi.org/10.1016/j.tsf.2006.11.046
Publication status	Published - 9 Apr 2007
Externally published	Yes

Keywords

Indium nitride
Ion-beam-assisted filtered cathodic vacuum arc technique
Optical properties
Structural properties

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2006.11.046

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title = "Structural and optical properties of wurtzite InN grown on Si(111)",

abstract = "We report the structural and optical properties of InN films on Si(111) prepared by ion-beam-assisted filtered cathodic vacuum arc technique. X-ray diffraction and Raman spectroscopy measurements indicated that all the InN films were hexagonal crystalline InN. The InN films deposited at substrate temperature of 475 °C exhibited highly (0001) preferred orientation and texturing (cratered) surface morphology. The oxygen incorporated in the InN films was segregated in the form of amorphous indium oxide or oxynitride phases at the grain boundaries. Photoluminescence emission of ∼ 1.15 eV was observed at room temperature from the InN films.",

keywords = "Indium nitride, Ion-beam-assisted filtered cathodic vacuum arc technique, Optical properties, Structural properties",

author = "Ji, {X. H.} and Lau, {Shu Ping} and Yang, {H. Y.} and Zhang, {Q. Y.}",

year = "2007",

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T1 - Structural and optical properties of wurtzite InN grown on Si(111)

AU - Ji, X. H.

AU - Lau, Shu Ping

AU - Yang, H. Y.

AU - Zhang, Q. Y.

PY - 2007/4/9

Y1 - 2007/4/9

N2 - We report the structural and optical properties of InN films on Si(111) prepared by ion-beam-assisted filtered cathodic vacuum arc technique. X-ray diffraction and Raman spectroscopy measurements indicated that all the InN films were hexagonal crystalline InN. The InN films deposited at substrate temperature of 475 °C exhibited highly (0001) preferred orientation and texturing (cratered) surface morphology. The oxygen incorporated in the InN films was segregated in the form of amorphous indium oxide or oxynitride phases at the grain boundaries. Photoluminescence emission of ∼ 1.15 eV was observed at room temperature from the InN films.

AB - We report the structural and optical properties of InN films on Si(111) prepared by ion-beam-assisted filtered cathodic vacuum arc technique. X-ray diffraction and Raman spectroscopy measurements indicated that all the InN films were hexagonal crystalline InN. The InN films deposited at substrate temperature of 475 °C exhibited highly (0001) preferred orientation and texturing (cratered) surface morphology. The oxygen incorporated in the InN films was segregated in the form of amorphous indium oxide or oxynitride phases at the grain boundaries. Photoluminescence emission of ∼ 1.15 eV was observed at room temperature from the InN films.

KW - Indium nitride

KW - Ion-beam-assisted filtered cathodic vacuum arc technique

KW - Optical properties

KW - Structural properties

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DO - 10.1016/j.tsf.2006.11.046

M3 - Journal article

SN - 0040-6090

VL - 515

SP - 4619

EP - 4623

JO - Thin Solid Films

JF - Thin Solid Films

IS - 11

ER -

Structural and optical properties of wurtzite InN grown on Si(111)

Abstract

Keywords

ASJC Scopus subject areas

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