Keyphrases
Mechanical Properties
100%
Structural Properties
100%
Dual-ion
100%
Ion Beam Assisted Deposition
100%
N-N Bond
100%
Adhesion
50%
X-ray Photoelectron Spectroscopy
50%
Experiment Test
50%
Hexagonal Structure
50%
Structural Change
50%
Film Structure
50%
Buffer Layer
50%
Infrared Absorption
50%
Internal Stress
50%
Si Content
50%
Ion Beam
50%
Spectroscopy Infrared
50%
Cubic Structure
50%
Nanoindentation Test
50%
Silicon Substrate
50%
Minimum Value
50%
Quartz Substrate
50%
Cubic Phase
50%
Cubic Boron Nitride (c-BN)
50%
Absorption Experiments
50%
H-BN Films
50%
Engineering
Structural Property
100%
Observables
50%
Silicon Substrate
50%
Ray Photoelectron Spectroscopy
50%
Nanoindentation Test
50%
Internal Stress
50%
Buffer Layer
50%
Infrared Absorption
50%
Silicon Dioxide
50%
Material Science
Structural Property
100%
Ion Beam Deposition
100%
Film
100%
Photoemission Spectroscopy
33%
Nanoindentation
33%
Buffer Layer
33%
Cubic Boron Nitride
33%
Silicon
33%
Physics
Ion Beam
100%
Nanoindentation
50%
Infrared Absorption
50%
Photoelectron Spectroscopy
50%