Strontium barium niobate thin films prepared by pulsed laser deposition

Y. Liu, Chung Wo Ong, P. W. Chan, C. L. Choy

Research output: Journal article publicationConference articleAcademic researchpeer-review

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Abstract

Strontium barium niobate Sr0.55Ba0.45Nb2O6 thin films were prepared on Si (111) substrates by pulsed laser deposition (PLD). The film composition was determined as a function of the fluence Φ and wavelength λ of the laser beam, the oxygen ambient pressure PO(2) and the substrate temperature Ts. The results show that the film composition is very close to that of the target, and is almost independent of Φ from 1 to 8 J cm-2, λ = 355, 532 and 1064 nm, PO(2) from 0 to 150 mTorr, and Ts from 25 to 700 °C. These results suggest that PLD is excellent for preparing SBN films with compositions congruent to that of the target. The x-ray diffraction data show that all the samples deposited at room temperature are amorphous. The x-ray diffraction results also indicate that the samples deposited at 700 °C have a tungsten-bronze-(TB-) type structure with preferred crystallite orientation, while the room-temperature-deposited samples after annealing at 800 °C for 30 minutes are polycrystalline and have random crystallite orientation.
Original languageEnglish
Pages (from-to)557-562
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume361
Publication statusPublished - 1 Jan 1995
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, United States
Duration: 29 Nov 19942 Dec 1994

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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