The lattice strain distributions of epitaxial SrTi O3 films deposited on LaAl O3 were investigated by in situ x-ray diffraction at the temperature range of 25-300 K, grazing incident x-ray diffraction, and high resolution x-ray diffraction. The nearly linear temperature dependence of the out-of-plane lattice constant of SrTi O3 was observed in the measured temperature range. The depth distribution of the lattice strain at room temperature for SrTi O3 films includes the surface layer, strained layer, and interface layer.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)