Statics and dynamics performance evaluation for a high precision XYZ compliant parallel micromanipulator

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

4 Citations (Scopus)


The performance evaluation on a newly designed XYZ compliant parallel micromanipulator (CPM) in terms of statics and dynamics is carried out in this paper, which is quite necessary in designing the CPM considering the stiffness and natural frequency requirements. By investigating the elastic deformations in each flexure hinge, the stiffness model in the working directions of the CPM is established. In addition, by expressing both potential and kinetic energies of the CPM with the chosen generalized coordinates, the dynamic equation is derived via the Lagrangian approach. Through the finite element analysis performed in ANSYS software package, not only the stiffness model is tested by the nonlinear statics analysis, but also the dynamic model is verified based on the conducted modal analysis. The simulation results validate the effectiveness and efficiency of the obtained analytical models. And the presented results are meaningful for both the design and development of a CPM for micro/nano scale manipulation.
Original languageEnglish
Title of host publication2007 IEEE International Conference on Robotics and Biomimetics, ROBIO
PublisherIEEE Computer Society
Number of pages6
ISBN (Print)9781424417582
Publication statusPublished - 1 Jan 2007
Externally publishedYes
Event2007 IEEE International Conference on Robotics and Biomimetics, ROBIO - Yalong Bay, Sanya, China
Duration: 15 Dec 200718 Dec 2007


Conference2007 IEEE International Conference on Robotics and Biomimetics, ROBIO
CityYalong Bay, Sanya


  • Dynamics
  • Finite element analysis
  • Micro-manipulators
  • Parallel mechanisms
  • Statics

ASJC Scopus subject areas

  • Artificial Intelligence
  • Control and Systems Engineering
  • Biomaterials

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