State-of-the-art in Micro-Hotplates

Zhenan Tang; Xikui Li; Gengdong Cheng; Philip Ching Ho Chan; Johnny K O Sin

State-of-the-art in Micro-Hotplates

Zhenan Tang, Xikui Li, Gengdong Cheng, Philip Ching Ho Chan, Johnny K O Sin

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

Micro-hotplate (MHP) is a microheater fabricated with integrated circuit (IC) technology and micromachining on silicon substrate. Because of low power consumption, fast thermal response, and ability of integrating with ICs, the MHP is a very useful device to develop microsensors and biochips, and to study heat transfer in microscale. The state-of-the art in MHP and future directions are reviewed in this paper.

Original language	English
Pages (from-to)	355-360
Number of pages	6
Journal	International Journal of Nonlinear Sciences and Numerical Simulation
Volume	1
Issue number	SUPPL.
Publication status	Published - 1 Dec 2000
Externally published	Yes

Keywords

Micro-hotplate (MHP)
Microsensors

ASJC Scopus subject areas

Engineering (miscellaneous)
Computational Mechanics
Mechanics of Materials
Applied Mathematics
Modelling and Simulation
Physics and Astronomy(all)
Statistical and Nonlinear Physics

Cite this

@article{01dbeed4be5a478d8f9d3f8ef368aace,

title = "State-of-the-art in Micro-Hotplates",

abstract = "Micro-hotplate (MHP) is a microheater fabricated with integrated circuit (IC) technology and micromachining on silicon substrate. Because of low power consumption, fast thermal response, and ability of integrating with ICs, the MHP is a very useful device to develop microsensors and biochips, and to study heat transfer in microscale. The state-of-the art in MHP and future directions are reviewed in this paper.",

keywords = "Micro-hotplate (MHP), Microsensors",

author = "Zhenan Tang and Xikui Li and Gengdong Cheng and Chan, {Philip Ching Ho} and Sin, {Johnny K O}",

year = "2000",

month = dec,

day = "1",

language = "English",

volume = "1",

pages = "355--360",

journal = "International Journal of Nonlinear Sciences and Numerical Simulation",

issn = "1565-1339",

publisher = "Walter de Gruyter GmbH",

number = "SUPPL.",

}

TY - JOUR

T1 - State-of-the-art in Micro-Hotplates

AU - Tang, Zhenan

AU - Li, Xikui

AU - Cheng, Gengdong

AU - Chan, Philip Ching Ho

AU - Sin, Johnny K O

PY - 2000/12/1

Y1 - 2000/12/1

N2 - Micro-hotplate (MHP) is a microheater fabricated with integrated circuit (IC) technology and micromachining on silicon substrate. Because of low power consumption, fast thermal response, and ability of integrating with ICs, the MHP is a very useful device to develop microsensors and biochips, and to study heat transfer in microscale. The state-of-the art in MHP and future directions are reviewed in this paper.

AB - Micro-hotplate (MHP) is a microheater fabricated with integrated circuit (IC) technology and micromachining on silicon substrate. Because of low power consumption, fast thermal response, and ability of integrating with ICs, the MHP is a very useful device to develop microsensors and biochips, and to study heat transfer in microscale. The state-of-the art in MHP and future directions are reviewed in this paper.

KW - Micro-hotplate (MHP)

KW - Microsensors

UR - http://www.scopus.com/inward/record.url?scp=0347056552&partnerID=8YFLogxK

M3 - Journal article

SN - 1565-1339

VL - 1

SP - 355

EP - 360

JO - International Journal of Nonlinear Sciences and Numerical Simulation

JF - International Journal of Nonlinear Sciences and Numerical Simulation

IS - SUPPL.

ER -

State-of-the-art in Micro-Hotplates

Abstract

Keywords

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this