State-of-the-art in Micro-Hotplates

Zhenan Tang, Xikui Li, Gengdong Cheng, Philip Ching Ho Chan, Johnny K O Sin

Research output: Journal article publicationJournal articleAcademic researchpeer-review

1 Citation (Scopus)

Abstract

Micro-hotplate (MHP) is a microheater fabricated with integrated circuit (IC) technology and micromachining on silicon substrate. Because of low power consumption, fast thermal response, and ability of integrating with ICs, the MHP is a very useful device to develop microsensors and biochips, and to study heat transfer in microscale. The state-of-the art in MHP and future directions are reviewed in this paper.
Original languageEnglish
Pages (from-to)355-360
Number of pages6
JournalInternational Journal of Nonlinear Sciences and Numerical Simulation
Volume1
Issue numberSUPPL.
Publication statusPublished - 1 Dec 2000
Externally publishedYes

Keywords

  • Micro-hotplate (MHP)
  • Microsensors

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Computational Mechanics
  • Mechanics of Materials
  • Applied Mathematics
  • Modelling and Simulation
  • Physics and Astronomy(all)
  • Statistical and Nonlinear Physics

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