Stable, high-Q fabry-perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors

M. Malak; N. Pavy; F. Marty; Y. A. Peter; A. Q. Liu; T. Bourouina

doi:10.1109/MEMSYS.2011.5734526

Stable, high-Q fabry-perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors

M. Malak, N. Pavy, F. Marty, Y. A. Peter, A. Q. Liu, T. Bourouina

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

9 Citations (Scopus)

Abstract

For the first time, we demonstrate experimentally high optical quality factor Q ∼9000 in MEMS-compatible silicon Fabry-Pérot (FP) resonators based on free space propagation of light and direct coupling to optical fiber. This result is obtained on long cavity resonators (L > 250 μm), a usually difficult case in terms of power loss. The resonator design includes two multilayered silicon-air Bragg mirrors of cylindrical shape, combined with a Fiber Rod Lens (FRL). Dimensions are chosen according to stability criteria imposed on the optical resonator. The core of the presented device is entirely made of single-crystal silicon. It is obtained by DRIE using an optimized single step process.

Original language	English
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages	720-723
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734526
Publication status	Published - Jan 2011
Externally published	Yes
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Country/Territory	Mexico
City	Cancun
Period	23/01/11 → 27/01/11

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

More information

10.1109/MEMSYS.2011.5734526

Cite this

Malak, M., Pavy, N., Marty, F., Peter, Y. A., Liu, A. Q., & Bourouina, T. (2011). Stable, high-Q fabry-perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 720-723). Article 5734526 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734526

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abstract = "For the first time, we demonstrate experimentally high optical quality factor Q ∼9000 in MEMS-compatible silicon Fabry-P{\'e}rot (FP) resonators based on free space propagation of light and direct coupling to optical fiber. This result is obtained on long cavity resonators (L > 250 μm), a usually difficult case in terms of power loss. The resonator design includes two multilayered silicon-air Bragg mirrors of cylindrical shape, combined with a Fiber Rod Lens (FRL). Dimensions are chosen according to stability criteria imposed on the optical resonator. The core of the presented device is entirely made of single-crystal silicon. It is obtained by DRIE using an optimized single step process.",

author = "M. Malak and N. Pavy and F. Marty and Peter, {Y. A.} and Liu, {A. Q.} and T. Bourouina",

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Malak, M, Pavy, N, Marty, F, Peter, YA, Liu, AQ & Bourouina, T 2011, Stable, high-Q fabry-perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734526, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 720-723, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734526

Stable, high-Q fabry-perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors. / Malak, M.; Pavy, N.; Marty, F. et al.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 720-723 5734526 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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Malak M, Pavy N, Marty F, Peter YA, Liu AQ, Bourouina T. Stable, high-Q fabry-perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 720-723. 5734526. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2011.5734526

Stable, high-Q fabry-perot resonators with long cavity based on curved, all-silicon, high reflectance mirrors

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