Spurious wave suppression in BAW resonators with frame-like airgap

Wenxia Yang, Wai Yip Tam

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

4 Citations (Scopus)

Abstract

In this paper, a new membrane resonator structure for suppressing the spurious waves is proposed. The proposed structure consists of a piezoelectric slab sandwiched between the bottom electrode with a frame-like airgap and a solid top electrode. The finite-difference time-domain (FDTD) method is applied to extract the displacements to illustrate the reduction of spurious waves.
Original languageEnglish
Title of host publication2010 IEEE International Frequency Control Symposium, FCS 2010
Pages656-660
Number of pages5
DOIs
Publication statusPublished - 19 Oct 2010
Event2010 IEEE International Frequency Control Symposium, FCS 2010 - Newport Beach, CA, United States
Duration: 1 Jun 20104 Jun 2010

Conference

Conference2010 IEEE International Frequency Control Symposium, FCS 2010
Country/TerritoryUnited States
CityNewport Beach, CA
Period1/06/104/06/10

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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