Spurious wave suppression in BAW resonators with frame-like airgap

Wenxia Yang; Wai Yip Tam

doi:10.1109/FREQ.2010.5556248

Spurious wave suppression in BAW resonators with frame-like airgap

The Hong Kong Polytechnic University

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

5 Citations (Scopus)

Abstract

In this paper, a new membrane resonator structure for suppressing the spurious waves is proposed. The proposed structure consists of a piezoelectric slab sandwiched between the bottom electrode with a frame-like airgap and a solid top electrode. The finite-difference time-domain (FDTD) method is applied to extract the displacements to illustrate the reduction of spurious waves.

Original language	English
Title of host publication	2010 IEEE International Frequency Control Symposium, FCS 2010
Pages	656-660
Number of pages	5
DOIs	https://doi.org/10.1109/FREQ.2010.5556248
Publication status	Published - 19 Oct 2010
Event	2010 IEEE International Frequency Control Symposium, FCS 2010 - Newport Beach, CA, United States Duration: 1 Jun 2010 → 4 Jun 2010

Conference

Conference	2010 IEEE International Frequency Control Symposium, FCS 2010
Country/Territory	United States
City	Newport Beach, CA
Period	1/06/10 → 4/06/10

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1109/FREQ.2010.5556248

Cite this

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title = "Spurious wave suppression in BAW resonators with frame-like airgap",

abstract = "In this paper, a new membrane resonator structure for suppressing the spurious waves is proposed. The proposed structure consists of a piezoelectric slab sandwiched between the bottom electrode with a frame-like airgap and a solid top electrode. The finite-difference time-domain (FDTD) method is applied to extract the displacements to illustrate the reduction of spurious waves.",

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AB - In this paper, a new membrane resonator structure for suppressing the spurious waves is proposed. The proposed structure consists of a piezoelectric slab sandwiched between the bottom electrode with a frame-like airgap and a solid top electrode. The finite-difference time-domain (FDTD) method is applied to extract the displacements to illustrate the reduction of spurious waves.

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M3 - Conference article published in proceeding or book

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Y2 - 1 June 2010 through 4 June 2010

ER -

Spurious wave suppression in BAW resonators with frame-like airgap

Abstract

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