Spectroscopic ellipsometry study of epitaxially grown Pb(Mg1/3Nb2/3)O3-PbTiO3MgO/TiN/Si heterostructures

W. S. Tsang; K. Y. Chan; Chee Leung Mak; K. H. Wong

doi:10.1063/1.1603339

Spectroscopic ellipsometry study of epitaxially grown Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃MgO/TiN/Si heterostructures

W. S. Tsang
, K. Y. Chan
, Chee Leung Mak
, K. H. Wong

Research output: Journal article publication › Journal article › Academic research › peer-review

28 Citations (Scopus)

Abstract

A study was conducted on the epitaxial growth of thin films on MgO/TiN buffered Si(001) substrates by pulsed laser deposition. X-ray diffraction and scanning electron microscopy techniques were used to study their structural properties and surface morphology. The results showed that these heterostructures form good optical waveguides.

Original language	English
Pages (from-to)	1599-1601
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	8
DOIs	https://doi.org/10.1063/1.1603339
Publication status	Published - 25 Aug 2003

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

More information

10.1063/1.1603339

http://hdl.handle.net/10397/4229

Cite this

@article{5e4a89c45855489993a247cfa6667f78,

title = "Spectroscopic ellipsometry study of epitaxially grown Pb(Mg1/3Nb2/3)O3-PbTiO3MgO/TiN/Si heterostructures",

abstract = "A study was conducted on the epitaxial growth of thin films on MgO/TiN buffered Si(001) substrates by pulsed laser deposition. X-ray diffraction and scanning electron microscopy techniques were used to study their structural properties and surface morphology. The results showed that these heterostructures form good optical waveguides.",

author = "Tsang, \{W. S.\} and Chan, \{K. Y.\} and Mak, \{Chee Leung\} and Wong, \{K. H.\}",

year = "2003",

month = aug,

day = "25",

doi = "10.1063/1.1603339",

language = "English",

volume = "83",

pages = "1599--1601",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "8",

}

TY - JOUR

T1 - Spectroscopic ellipsometry study of epitaxially grown Pb(Mg1/3Nb2/3)O3-PbTiO3MgO/TiN/Si heterostructures

AU - Tsang, W. S.

AU - Chan, K. Y.

AU - Mak, Chee Leung

AU - Wong, K. H.

PY - 2003/8/25

Y1 - 2003/8/25

N2 - A study was conducted on the epitaxial growth of thin films on MgO/TiN buffered Si(001) substrates by pulsed laser deposition. X-ray diffraction and scanning electron microscopy techniques were used to study their structural properties and surface morphology. The results showed that these heterostructures form good optical waveguides.

AB - A study was conducted on the epitaxial growth of thin films on MgO/TiN buffered Si(001) substrates by pulsed laser deposition. X-ray diffraction and scanning electron microscopy techniques were used to study their structural properties and surface morphology. The results showed that these heterostructures form good optical waveguides.

UR - https://www.scopus.com/pages/publications/0042782775

U2 - 10.1063/1.1603339

DO - 10.1063/1.1603339

M3 - Journal article

SN - 0003-6951

VL - 83

SP - 1599

EP - 1601

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 8

ER -

Spectroscopic ellipsometry study of epitaxially grown Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃MgO/TiN/Si heterostructures

Abstract

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this