Spectroscopic ellipsometry studies of BaxSr(1-x)TiO3 multilayer structure

Yue Li Zhang, Dang Mo, S. U. Adikary, Chee Leung Mak, H. L W Chen, C. L. Choy

Research output: Journal article publicationJournal articleAcademic researchpeer-review


BaxSr(1-x)TiO3 single layer and graded multilayer structure films ( Ba0.7Sr0.3 TiO3, Ba0.8Sr0.2TiO3, Ba0.9Sr0.lTiO3, BaTiO3) deposited on Si (100) substrate were prepared by sol-gel technique. The variable angle spectroscopic ellipsometric spectra of the BaxSr(1-x)TiO3 multilayer structure film were obtained in the spectral range of 380-800 nm, and the thickness and refractive index of the BaxSr(1-x)TiO3 multilayer structure film were determined for the first time. The results show that the thickness of multilayer structure film from ellipsometric spectra is consistent with that from RBS, and the refractive index of BaTiO3 film in multilayer is much larger than that in single layer, but closer to that in single crystal.
Original languageChinese (Simplified)
Pages (from-to)13-17
Number of pages5
JournalHongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Issue number1
Publication statusPublished - 1 Feb 2003


  • Ba Sr TiO x (1-x) 3
  • Multilayer thin film
  • Optical constants
  • Spectroscopic ellipsometry

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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