Abstract
BaxSr(1-x)TiO3 single layer and graded multilayer structure films ( Ba0.7Sr0.3 TiO3, Ba0.8Sr0.2TiO3, Ba0.9Sr0.lTiO3, BaTiO3) deposited on Si (100) substrate were prepared by sol-gel technique. The variable angle spectroscopic ellipsometric spectra of the BaxSr(1-x)TiO3 multilayer structure film were obtained in the spectral range of 380-800 nm, and the thickness and refractive index of the BaxSr(1-x)TiO3 multilayer structure film were determined for the first time. The results show that the thickness of multilayer structure film from ellipsometric spectra is consistent with that from RBS, and the refractive index of BaTiO3 film in multilayer is much larger than that in single layer, but closer to that in single crystal.
| Original language | Chinese (Simplified) |
|---|---|
| Pages (from-to) | 13-17 |
| Number of pages | 5 |
| Journal | Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves |
| Volume | 22 |
| Issue number | 1 |
| Publication status | Published - 1 Feb 2003 |
Keywords
- Ba Sr TiO x (1-x) 3
- Multilayer thin film
- Optical constants
- Spectroscopic ellipsometry
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics