Sol-gel derived lead-free piezoelectric Bi1/2Na1/2TiO3thin film for MEMS applications

Ting Yu, Kin Wing Kwok, Helen Chan

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

6 Citations (Scopus)

Abstract

Bi1/2Na1/2TiO3(abreviated as BNT) is considered as a promising lead-free piezoelectric material for sensor and actuator applications. In this study, we demonstrate an improved sol-gel process using rapid thermal annealing (RTA). Our results indicate that thermal annealing in an oxygen atmosphere after each layer of coating is effective in promoting crystallization of the BNT film at a low temperature of 650°C. The resulting film is dense and well crystallized in the perovskite phase. The piezoelectric properties of the sol-gel derived BNT films are characterized with the help of a laser interferometer. The BNT based film is expected to be a new and promising candidate for lead-free piezoelectric MEMS applications.
Original languageEnglish
Title of host publication2006 15th IEEE International Symposium on Applications of Ferroelectrics, ISAF
DOIs
Publication statusPublished - 1 Dec 2006
Event2006 15th IEEE International Symposium on Applications of Ferroelectrics, ISAF - Sunset Beach, NC, United States
Duration: 30 Jul 20063 Aug 2006

Conference

Conference2006 15th IEEE International Symposium on Applications of Ferroelectrics, ISAF
Country/TerritoryUnited States
CitySunset Beach, NC
Period30/07/063/08/06

Keywords

  • Lead-free
  • MEMS
  • Piezoelectric
  • Sol-gel
  • Thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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