Sliding mode control of a Piezo-driven micropositioning system using extended Kalman filter

Qingsong Xu; Yangmin Li

doi:10.1109/ICAL.2010.5585322

Sliding mode control of a Piezo-driven micropositioning system using extended Kalman filter

Qingsong Xu
, Yangmin Li

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

8 Citations (Scopus)

Abstract

In this paper, a sliding mode control with perturbation estimation (SMCPE) using an extended Kalman filter (EKF) is proposed for the motion tracking control of a micropositioning system with piezoelectric actuation. Based on the solely measurable position information, the EKF on-line estimates not only the velocity but also the hysteresis term, which are used by the SMCPE for real-time control. The feasibility of the proposed control scheme is demonstrated by experimental studies on a XYZ micropositioning stage prototype. Results show that the EKF-based sliding mode control can reduce the hysteresis to a negligible level and lead to a motion tracking with submicron accuracy, which provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation.

Original language	English
Title of host publication	2010 IEEE International Conference on Automation and Logistics, ICAL 2010
Pages	427-432
Number of pages	6
DOIs	https://doi.org/10.1109/ICAL.2010.5585322
Publication status	Published - 17 Nov 2010
Externally published	Yes
Event	2010 IEEE International Conference on Automation and Logistics, ICAL 2010 - Shatin, Hong Kong Duration: 16 Aug 2010 → 20 Aug 2010

Conference

Conference	2010 IEEE International Conference on Automation and Logistics, ICAL 2010
Country/Territory	Hong Kong
City	Shatin
Period	16/08/10 → 20/08/10

Keywords

Hysteresis compensation
Micro/nano-positioning
Nonlinear control
Piezoelectric actuation

ASJC Scopus subject areas

Control and Systems Engineering

More information

10.1109/ICAL.2010.5585322

Cite this

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title = "Sliding mode control of a Piezo-driven micropositioning system using extended Kalman filter",

abstract = "In this paper, a sliding mode control with perturbation estimation (SMCPE) using an extended Kalman filter (EKF) is proposed for the motion tracking control of a micropositioning system with piezoelectric actuation. Based on the solely measurable position information, the EKF on-line estimates not only the velocity but also the hysteresis term, which are used by the SMCPE for real-time control. The feasibility of the proposed control scheme is demonstrated by experimental studies on a XYZ micropositioning stage prototype. Results show that the EKF-based sliding mode control can reduce the hysteresis to a negligible level and lead to a motion tracking with submicron accuracy, which provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation.",

keywords = "Hysteresis compensation, Micro/nano-positioning, Nonlinear control, Piezoelectric actuation",

author = "Qingsong Xu and Yangmin Li",

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Sliding mode control of a Piezo-driven micropositioning system using extended Kalman filter. / Xu, Qingsong; Li, Yangmin.
2010 IEEE International Conference on Automation and Logistics, ICAL 2010. 2010. p. 427-432 5585322.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Li, Yangmin

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N2 - In this paper, a sliding mode control with perturbation estimation (SMCPE) using an extended Kalman filter (EKF) is proposed for the motion tracking control of a micropositioning system with piezoelectric actuation. Based on the solely measurable position information, the EKF on-line estimates not only the velocity but also the hysteresis term, which are used by the SMCPE for real-time control. The feasibility of the proposed control scheme is demonstrated by experimental studies on a XYZ micropositioning stage prototype. Results show that the EKF-based sliding mode control can reduce the hysteresis to a negligible level and lead to a motion tracking with submicron accuracy, which provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation.

AB - In this paper, a sliding mode control with perturbation estimation (SMCPE) using an extended Kalman filter (EKF) is proposed for the motion tracking control of a micropositioning system with piezoelectric actuation. Based on the solely measurable position information, the EKF on-line estimates not only the velocity but also the hysteresis term, which are used by the SMCPE for real-time control. The feasibility of the proposed control scheme is demonstrated by experimental studies on a XYZ micropositioning stage prototype. Results show that the EKF-based sliding mode control can reduce the hysteresis to a negligible level and lead to a motion tracking with submicron accuracy, which provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation.

KW - Hysteresis compensation

KW - Micro/nano-positioning

KW - Nonlinear control

KW - Piezoelectric actuation

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M3 - Conference article published in proceeding or book

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BT - 2010 IEEE International Conference on Automation and Logistics, ICAL 2010

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Y2 - 16 August 2010 through 20 August 2010

ER -

Sliding mode control of a Piezo-driven micropositioning system using extended Kalman filter

Abstract

Conference

Keywords

ASJC Scopus subject areas

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