Sliding mode control of a Piezo-driven micropositioning system using extended Kalman filter

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

7 Citations (Scopus)

Abstract

In this paper, a sliding mode control with perturbation estimation (SMCPE) using an extended Kalman filter (EKF) is proposed for the motion tracking control of a micropositioning system with piezoelectric actuation. Based on the solely measurable position information, the EKF on-line estimates not only the velocity but also the hysteresis term, which are used by the SMCPE for real-time control. The feasibility of the proposed control scheme is demonstrated by experimental studies on a XYZ micropositioning stage prototype. Results show that the EKF-based sliding mode control can reduce the hysteresis to a negligible level and lead to a motion tracking with submicron accuracy, which provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation.
Original languageEnglish
Title of host publication2010 IEEE International Conference on Automation and Logistics, ICAL 2010
Pages427-432
Number of pages6
DOIs
Publication statusPublished - 17 Nov 2010
Externally publishedYes
Event2010 IEEE International Conference on Automation and Logistics, ICAL 2010 - Shatin, Hong Kong
Duration: 16 Aug 201020 Aug 2010

Conference

Conference2010 IEEE International Conference on Automation and Logistics, ICAL 2010
CountryHong Kong
CityShatin
Period16/08/1020/08/10

Keywords

  • Hysteresis compensation
  • Micro/nano-positioning
  • Nonlinear control
  • Piezoelectric actuation

ASJC Scopus subject areas

  • Control and Systems Engineering

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