Single semicircular response of dielectric properties of diamond films

Haitao Ye, Chang Q. Sun, Haitao Huang, Peter Hing

Research output: Journal article publicationJournal articleAcademic researchpeer-review

24 Citations (Scopus)

Abstract

Diamond films were synthesized by a microwave plasma-enhanced chemical vapor deposition method using H2/CH4gas mixtures. A Fluke PM6306 RCL Meter was used to study the dielectric properties of the diamond films deposited. The dielectric dispersion measurement yielded the real and imaginary parts of impedance of diamond films in the form of a depressed semicircle in a complex plane. A Cole-Cole plot was observed at frequencies from 50 Hz to 1 MHz. The result was found to fit the theoretical resistor-capacitor parallel circuit model. The structure and quality of diamond films were analyzed by scanning electron microscopy, X-ray diffraction and Raman spectroscopy.
Original languageEnglish
Pages (from-to)52-56
Number of pages5
JournalThin Solid Films
Volume381
Issue number1
DOIs
Publication statusPublished - 2 Jan 2001
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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