Single-probe-beam differential amplitude and phase-scanning interferometer

Manfred B. Suddendorf, Michael Geoffrey Somekh, Chung Wah See

Research output: Journal article publicationJournal articleAcademic researchpeer-review

6 Citations (Scopus)

Abstract

We describe a common path differential amplitude and phase interferometer capable of measuring differential amplitude and phase responses simultaneously. The system uses a single probe beam that is imaged onto the detector plane; differentiation in any direction can be performed by the alteration of the position of the detectors. Experimental and theoretical results, which show excellent agreement, are presented to demonstrate how the transfer function of the system can be controlled to suit different application areas.
Original languageEnglish
Pages (from-to)6202-6210
Number of pages9
JournalApplied Optics
Volume36
Issue number25
DOIs
Publication statusPublished - 1 Sep 1997
Externally publishedYes

Keywords

  • Differential phase measurement
  • Interferometry
  • Scanning optical profilometry
  • Stepheight measurement

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)

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