Single-pole-four-throw switch using high-aspect-ratio lateral switches

A. Q. Liu, W. Palei, M. Tang, A. Alphones

Research output: Journal article publicationJournal articleAcademic researchpeer-review

23 Citations (Scopus)


A single-pole-four-throw (SP4T) switch using a high-aspect ratio lateral metal-contact micromachined switch is reported. This simplified SP4T micromachined switch is developed using deep reactive ion etching fabrication technology based on silicon-on-insulator wafer. The measurement results of the SP4T switch show an insertion loss of less than 1 dB and isolation of 30 dB from DC to 6 GHz.

Original languageEnglish
Pages (from-to)1125-1126
Number of pages2
JournalElectronics Letters
Issue number18
Publication statusPublished - 2 Sept 2004
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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