Single-/multi-mode tunable lasers using MEMS mirror and grating

A. Q. Liu, Xuming Zhang, J. Li, C. Lu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

18 Citations (Scopus)


The microelectromechanical systems (MEMS) technology has been widely applied to develop the miniaturized external cavity tunable lasers. In this paper, two integrated MEMS tunable lasers using different configurations are presented and discussed. One uses a deep-etched circular mirror as the external converging reflector. It works in multiple longitudinal modes and has mode hopping. The other employs a deep-etched rotary blazed grating as the reflector and filter simultaneously. Single-longitudinal mode operation is achieved and mode hopping can be avoided.
Original languageEnglish
Pages (from-to)49-54
Number of pages6
JournalSensors and Actuators, A: Physical
Issue number1-3
Publication statusPublished - 15 Nov 2003
Externally publishedYes


  • Blazed grating
  • DWDM
  • MEMS
  • Optical MEMS
  • Tunable laser

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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