Simple extra-short external cavity laser self-mixing interferometer for acceleration sensing

Franck Chollet, Gopalkrishna Hegde, Anand Asundi, Ai Qun Liu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

5 Citations (Scopus)


We have fabricated and tested an external cavity laser with a micromachined flat polysilicon micro-mirror. The device works using a very short external cavity diode laser configuration (≈ 10 μm) allowing to exclude all optical elements in the cavity while providing enough feedback to modulate the intensity of the laser. We have shown that we could obtain feedback coefficient larger than 0.5, providing an increased sensitivity for sensor application. The device shows interesting characteristics for developing a compact and simple displacement/acceleration sensor with large dynamical range and a resolution estimated below 0.01 nm.

Original languageEnglish
Pages (from-to)272-279
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - Oct 2001
Externally publishedYes


  • Accelerometer
  • External cavity laser
  • Optical MEMS
  • Ultra-short cavity

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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