Simple extra-short external cavity laser self-mixing interferometer for acceleration sensing

Franck Chollet; Gopalkrishna Hegde; Anand Asundi; Ai Qun Liu

doi:10.1117/12.447353

Simple extra-short external cavity laser self-mixing interferometer for acceleration sensing

Franck Chollet, Gopalkrishna Hegde, Anand Asundi, Ai Qun Liu

Research output: Journal article publication › Journal article › Academic research › peer-review

5 Citations (Scopus)

Abstract

We have fabricated and tested an external cavity laser with a micromachined flat polysilicon micro-mirror. The device works using a very short external cavity diode laser configuration (≈ 10 μm) allowing to exclude all optical elements in the cavity while providing enough feedback to modulate the intensity of the laser. We have shown that we could obtain feedback coefficient larger than 0.5, providing an increased sensitivity for sensor application. The device shows interesting characteristics for developing a compact and simple displacement/acceleration sensor with large dynamical range and a resolution estimated below 0.01 nm.

Original language	English
Pages (from-to)	272-279
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4596
DOIs	https://doi.org/10.1117/12.447353
Publication status	Published - Oct 2001
Externally published	Yes

Keywords

Accelerometer
External cavity laser
Optical MEMS
Ultra-short cavity

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

More information

10.1117/12.447353

Cite this

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abstract = "We have fabricated and tested an external cavity laser with a micromachined flat polysilicon micro-mirror. The device works using a very short external cavity diode laser configuration (≈ 10 μm) allowing to exclude all optical elements in the cavity while providing enough feedback to modulate the intensity of the laser. We have shown that we could obtain feedback coefficient larger than 0.5, providing an increased sensitivity for sensor application. The device shows interesting characteristics for developing a compact and simple displacement/acceleration sensor with large dynamical range and a resolution estimated below 0.01 nm.",

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AU - Liu, Ai Qun

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N2 - We have fabricated and tested an external cavity laser with a micromachined flat polysilicon micro-mirror. The device works using a very short external cavity diode laser configuration (≈ 10 μm) allowing to exclude all optical elements in the cavity while providing enough feedback to modulate the intensity of the laser. We have shown that we could obtain feedback coefficient larger than 0.5, providing an increased sensitivity for sensor application. The device shows interesting characteristics for developing a compact and simple displacement/acceleration sensor with large dynamical range and a resolution estimated below 0.01 nm.

AB - We have fabricated and tested an external cavity laser with a micromachined flat polysilicon micro-mirror. The device works using a very short external cavity diode laser configuration (≈ 10 μm) allowing to exclude all optical elements in the cavity while providing enough feedback to modulate the intensity of the laser. We have shown that we could obtain feedback coefficient larger than 0.5, providing an increased sensitivity for sensor application. The device shows interesting characteristics for developing a compact and simple displacement/acceleration sensor with large dynamical range and a resolution estimated below 0.01 nm.

KW - Accelerometer

KW - External cavity laser

KW - Optical MEMS

KW - Ultra-short cavity

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Simple extra-short external cavity laser self-mixing interferometer for acceleration sensing

Abstract

Keywords

ASJC Scopus subject areas

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