Abstract
Boron-doped diamond film coated titanium (Ti/BDD) becomes increasingly attractive because of the combined properties of these two unique materials. The challenge for the composite material is the stability especially when it is used as an electrode. In order to meet this challenge, two temperature (2-temp) staged hot filament chemical vapor deposition method was employed in this study. The accelerated working life time was significantly increased to 804 hours for the 2-temp electrode, compared with 244 hours for the diamond film electrode fabricated under one temperature (1-temp) stage method. With the characterization of microRaman, XRD, and cross-sectional SEM, a multilayer of Ti/TiC/(Diamond+Amorphous Carbon)/Diamond can be found in the 2-temp sample and the structure of Ti/TiC/Diamond in the 1-temp sample. There was less void space observed in the interlayer of 2-temp sample. The multi-layered compact structure plays an important role in improving the adhesion of diamond film to the titanium substrate which in turn increases the electrode working life time by over 3 times.
Original language | English |
---|---|
Title of host publication | Diamond Electronics-Fundamentals to Applications |
Pages | 105-111 |
Number of pages | 7 |
Volume | 956 |
Publication status | Published - 1 Dec 2007 |
Externally published | Yes |
Event | 2006 MRS Fall Meeting - Boston, MA, United States Duration: 27 Nov 2006 → 1 Dec 2006 |
Conference
Conference | 2006 MRS Fall Meeting |
---|---|
Country/Territory | United States |
City | Boston, MA |
Period | 27/11/06 → 1/12/06 |
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering