Silicone rubber based highly sensitive fiber-optic fabry–perot interferometric gas pressure sensor

Xin Cheng; Jitendra Narayan Dash; Dinusha Serandi Gunawardena; Lin Htein; Hwa Yaw Tam

doi:10.3390/s20174927

Silicone rubber based highly sensitive fiber-optic fabry–perot interferometric gas pressure sensor

Xin Cheng
, Jitendra Narayan Dash
, Dinusha Serandi Gunawardena
, Lin Htein
, Hwa Yaw Tam

The Hong Kong Polytechnic University

Research output: Journal article publication › Letter › peer-review

45 Citations (Scopus)

Abstract

A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/^◦ C.

Original language	English
Article number	4927
Pages (from-to)	1-10
Number of pages	10
Journal	Sensors (Switzerland)
Volume	20
Issue number	17
DOIs	https://doi.org/10.3390/s20174927
Publication status	Published - 1 Sept 2020

Keywords

Fabry–Perot interferometer (FPI)
Gas pressure sensor
Optical fiber
Silicone rubber

ASJC Scopus subject areas

Analytical Chemistry
Biochemistry
Atomic and Molecular Physics, and Optics
Instrumentation
Electrical and Electronic Engineering

More information

10.3390/s20174927

http://hdl.handle.net/10397/88493

Cite this

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title = "Silicone rubber based highly sensitive fiber-optic fabry–perot interferometric gas pressure sensor",

abstract = "A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/◦ C.",

keywords = "Fabry–Perot interferometer (FPI), Gas pressure sensor, Optical fiber, Silicone rubber",

author = "Xin Cheng and Dash, \{Jitendra Narayan\} and Gunawardena, \{Dinusha Serandi\} and Lin Htein and Tam, \{Hwa Yaw\}",

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year = "2020",

month = sep,

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doi = "10.3390/s20174927",

language = "English",

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AU - Dash, Jitendra Narayan

AU - Gunawardena, Dinusha Serandi

AU - Htein, Lin

AU - Tam, Hwa Yaw

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PY - 2020/9/1

Y1 - 2020/9/1

N2 - A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/◦ C.

AB - A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/◦ C.

KW - Fabry–Perot interferometer (FPI)

KW - Gas pressure sensor

KW - Optical fiber

KW - Silicone rubber

UR - https://www.scopus.com/pages/publications/85090206597

U2 - 10.3390/s20174927

DO - 10.3390/s20174927

M3 - Letter

C2 - 32878217

AN - SCOPUS:85090206597

SN - 1424-8220

VL - 20

SP - 1

EP - 10

JO - Sensors (Switzerland)

JF - Sensors (Switzerland)

IS - 17

M1 - 4927

ER -

Silicone rubber based highly sensitive fiber-optic fabry–perot interferometric gas pressure sensor

Abstract

Keywords

ASJC Scopus subject areas

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