Silicone rubber based highly sensitive fiber-optic fabry–perot interferometric gas pressure sensor

Xin Cheng, Jitendra Narayan Dash, Dinusha Serandi Gunawardena, Lin Htein, Hwa Yaw Tam

Research output: Journal article publicationLetterpeer-review

3 Citations (Scopus)

Abstract

A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/ C.

Original languageEnglish
Article number4927
Pages (from-to)1-10
Number of pages10
JournalSensors (Switzerland)
Volume20
Issue number17
DOIs
Publication statusPublished - 1 Sep 2020

Keywords

  • Fabry–Perot interferometer (FPI)
  • Gas pressure sensor
  • Optical fiber
  • Silicone rubber

ASJC Scopus subject areas

  • Analytical Chemistry
  • Biochemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electrical and Electronic Engineering

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