High Q copper inductors were fabricated on low-cost and low-loss BT and glass substrate using electroplating process. A differential LC VCO circuit was designed using these high Q inductors at 2.4GHz. Flip chip and MCM technology were applied to assemble the active chips on BT and glass substrate. The inductors exhibited Q-factor as high as 30 at 2.4GHz. VCOs with copper inductors on BT and glass substrate had phase noise of -108 dBc/Hz at 600 kHz offset for a 2.4GHz carrier, which is 6dB improvement compared with the one with on-chip Al inductors.
|Number of pages||4|
|Journal||Proceedings of the Custom Integrated Circuits Conference|
|Publication status||Published - 19 Nov 2003|
|Event||Proceedings of the IEEE 2003 Custom Integrated Circuits Conference - San Jose, CA, United States|
Duration: 21 Sep 2003 → 24 Sep 2003
ASJC Scopus subject areas
- Electrical and Electronic Engineering