Si-Based light-emitting structure synthesized with low-energy ion implantation at a low dosage

In this work, Si-based light-emitting structures were synthesized by Si+ implantation into 30 nm thermally grown SiO2films with a low dosage (≤1 × 1016/cm2). The emission band of electroluminescence (EL) extends from 300 nm to 700 nm with a peak at around 500 nm. The onset voltage for the EL is around 5 V for the 8 keV implanted sample which is low enough for many device applications. The light emission mechanism is studied in this work. It is believed that the defects in the Si+ implanted SiO2films are the luminescent centers responsible for the EL. In addition, it is found the light emission intensity can be affected by charge trapping in nc-Si.