Shear-mode PMN-PT piezoelectric single crystal resonator for microfluidic applications

Kai Zhang, Siu Hong Choy, Libo Zhao, Haosu Luo, Helen Lai Wa Chan, Yu Wang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

10 Citations (Scopus)

Abstract

We report on the integration of a PMN-PT single crystal-based piezoelectric resonator in a microfluidic system. In this experiment, the resonator was implanted in the microfluidic channel through a standard soft lithography process with its top electrode in contact with the flowing fluid. The results showed that, activated in shear mode, the resonator sensed changes occurring along the fluid-electrode interface and gave responses in the form of impedance resonance frequency shift. By measuring the frequency shift, changes in the fluidic property (e.g. viscosity) could be monitored. Examples are given to demonstrate the potential use of the system for cell detections.

Original languageEnglish
Pages (from-to)1028-1032
Number of pages5
JournalMicroelectronic Engineering
Volume88
Issue number6
DOIs
Publication statusPublished - 1 Jun 2011

Keywords

  • Microfluidic system
  • Piezoelectric resonator
  • PMN-PT single crystal
  • Shear mode

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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