Self-polarization in PZT films

Kin Wing Kwok, Bing Wang, Helen Lai Wah Chan, Chung Loong Choy

Research output: Journal article publicationJournal articleAcademic researchpeer-review

9 Citations (Scopus)

Abstract

Sol-gel derived lead zirconate titanate (PbZr 0.4 Ti 0.6 O 3 , PZT) films of thickness 2 μm were spin-coated on RuO 2 /SiO 2 /Si substrates. A RuO 2 top electrode was then deposited on the PZT film by reactive rfmagnetron sputtering. X-ray diffraction studies reveal that the c-axis of the crystallites in the PZT film lies preferably in the plane of the film before the deposition of the RuO 2 top electrode. However, after the deposition of the RuO 2 top electrode, the c-axis of a large number of crystallites becomes normal to the plane of the film, thus leading to a large initial polarization (self-polarization) in the PZT film. The room-temperature pyroelectric coefficient of the PZT film is about 230 μC/m 2 K, and a large internal field of 40 kV/cm is also observed. We suggest that the PZT film is self-polarized by the internal field which is induced by the high-energy ion bombardment on the film surface during the rf-sputtering process.
Original languageEnglish
Pages (from-to)69-74
Number of pages6
JournalFerroelectrics
Volume271
DOIs
Publication statusPublished - 1 Jan 2002

Keywords

  • PZT films
  • Rf-magnetron sputtering
  • RuO Electrodes 2
  • Self-polarization

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this