SCANNING OPTICAL TECHNIQUES FOR SEMICONDUCTOR ANALYSIS.

Michael Geoffrey Somekh

Research output: Journal article publicationConference articleAcademic researchpeer-review

Abstract

Optical microscopy is perhaps one of the oldest means for surface examination of samples. The ready availability of lasers has opened up a host of new applications which would have been difficult to envisage before. These arise either because of the high power densities that can be generated from a laser source or from the coherence. The author discusses applications based on both characteristics. and the stages of development which have led from the idea of a simple Michelson type interferometer to some of the more recent developments of heterodyne interference microscopy.
Original languageEnglish
JournalIEE Colloquium (Digest)
Issue number1987 /12
Publication statusPublished - 1 Dec 1987
Externally publishedYes
EventColloquium on Testing and Inspection of Electronic Components and Circuits. - London, United Kingdom
Duration: 1 Dec 1987 → …

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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