Abstract
Optical microscopy is perhaps one of the oldest means for surface examination of samples. The ready availability of lasers has opened up a host of new applications which would have been difficult to envisage before. These arise either because of the high power densities that can be generated from a laser source or from the coherence. The author discusses applications based on both characteristics. and the stages of development which have led from the idea of a simple Michelson type interferometer to some of the more recent developments of heterodyne interference microscopy.
| Original language | English |
|---|---|
| Journal | IEE Colloquium (Digest) |
| Issue number | 1987 /12 |
| Publication status | Published - 1 Dec 1987 |
| Externally published | Yes |
| Event | Colloquium on Testing and Inspection of Electronic Components and Circuits. - London, United Kingdom Duration: 1 Dec 1987 → … |
ASJC Scopus subject areas
- Electrical and Electronic Engineering