Optical microscopy is perhaps one of the oldest means for surface examination of samples. The ready availability of lasers has opened up a host of new applications which would have been difficult to envisage before. These arise either because of the high power densities that can be generated from a laser source or from the coherence. The author discusses applications based on both characteristics. and the stages of development which have led from the idea of a simple Michelson type interferometer to some of the more recent developments of heterodyne interference microscopy.
|Journal||IEE Colloquium (Digest)|
|Issue number||1987 /12|
|Publication status||Published - 1 Dec 1987|
|Event||Colloquium on Testing and Inspection of Electronic Components and Circuits. - London, United Kingdom|
Duration: 1 Dec 1987 → …
ASJC Scopus subject areas
- Electrical and Electronic Engineering