Scanning microellipsometry for extraction of true topography

R. D. Holmes; C. W. See; Michael Geoffrey Somekh

doi:10.1049/el:19950278

Scanning microellipsometry for extraction of true topography

R. D. Holmes, C. W. See, Michael Geoffrey Somekh

Research output: Journal article publication › Journal article › Academic research › peer-review

6 Citations (Scopus)

Abstract

The amplitude and phase distributions at the back focal plane of a scanning interferometer are used to determine the phase of the optical reflection coefficient. This value for phase change is then used to correct the overall phase measured with the interferometer, so that pure topography measurement is achieved.

Original language	English
Pages (from-to)	358-359
Number of pages	2
Journal	Electronics Letters
Volume	31
Issue number	5
DOIs	https://doi.org/10.1049/el:19950278
Publication status	Published - 2 Mar 1995
Externally published	Yes

Keywords

Ellipsometry
Interferometry
Surface topography measurement

ASJC Scopus subject areas

Electrical and Electronic Engineering

More information

10.1049/el:19950278

Cite this

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title = "Scanning microellipsometry for extraction of true topography",

abstract = "The amplitude and phase distributions at the back focal plane of a scanning interferometer are used to determine the phase of the optical reflection coefficient. This value for phase change is then used to correct the overall phase measured with the interferometer, so that pure topography measurement is achieved.",

keywords = "Ellipsometry, Interferometry, Surface topography measurement",

author = "Holmes, {R. D.} and See, {C. W.} and Somekh, {Michael Geoffrey}",

year = "1995",

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doi = "10.1049/el:19950278",

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T1 - Scanning microellipsometry for extraction of true topography

AU - Holmes, R. D.

AU - See, C. W.

AU - Somekh, Michael Geoffrey

PY - 1995/3/2

Y1 - 1995/3/2

N2 - The amplitude and phase distributions at the back focal plane of a scanning interferometer are used to determine the phase of the optical reflection coefficient. This value for phase change is then used to correct the overall phase measured with the interferometer, so that pure topography measurement is achieved.

AB - The amplitude and phase distributions at the back focal plane of a scanning interferometer are used to determine the phase of the optical reflection coefficient. This value for phase change is then used to correct the overall phase measured with the interferometer, so that pure topography measurement is achieved.

KW - Ellipsometry

KW - Interferometry

KW - Surface topography measurement

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U2 - 10.1049/el:19950278

DO - 10.1049/el:19950278

M3 - Journal article

SN - 0013-5194

VL - 31

SP - 358

EP - 359

JO - Electronics Letters

JF - Electronics Letters

IS - 5

ER -

Scanning microellipsometry for extraction of true topography

Abstract

Keywords

ASJC Scopus subject areas

More information

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