Scanning microellipsometry for extraction of true topography

R. D. Holmes, C. W. See, Michael Geoffrey Somekh

Research output: Journal article publicationJournal articleAcademic researchpeer-review

6 Citations (Scopus)

Abstract

The amplitude and phase distributions at the back focal plane of a scanning interferometer are used to determine the phase of the optical reflection coefficient. This value for phase change is then used to correct the overall phase measured with the interferometer, so that pure topography measurement is achieved.
Original languageEnglish
Pages (from-to)358-359
Number of pages2
JournalElectronics Letters
Volume31
Issue number5
DOIs
Publication statusPublished - 2 Mar 1995
Externally publishedYes

Keywords

  • Ellipsometry
  • Interferometry
  • Surface topography measurement

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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