Scanning differential optical profilometer for simultaneous measurement of amplitude and phase variation

C. W. See; R. K. Appel; Michael Geoffrey Somekh

doi:10.1063/1.100118

Scanning differential optical profilometer for simultaneous measurement of amplitude and phase variation

C. W. See
, R. K. Appel
, Michael Geoffrey Somekh

Research output: Journal article publication › Journal article › Academic research › peer-review

37 Citations (Scopus)

Abstract

A scanning optical profilometer is described which can simultaneously and independently measure the differential phase/amplitude variation of light reflected off an object surface. This information may then be interpreted as topographical and reflectivity variation of the object surface. The system is based on a heterodyne interferometer and uses two beams to probe the surface. The theoretical sensitivity of the system is 3×10-3mrad in phase and 3 in 105in reflectivity variation, both measured in a 1 kHz bandwidth. Preliminary measurements of film thickness and reflectivity variation are presented. This system also has potential applications for imaging objects with minute structural variations.

Original language	English
Pages (from-to)	10-12
Number of pages	3
Journal	Applied Physics Letters
Volume	53
Issue number	1
DOIs	https://doi.org/10.1063/1.100118
Publication status	Published - 1 Dec 1988
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.100118

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N2 - A scanning optical profilometer is described which can simultaneously and independently measure the differential phase/amplitude variation of light reflected off an object surface. This information may then be interpreted as topographical and reflectivity variation of the object surface. The system is based on a heterodyne interferometer and uses two beams to probe the surface. The theoretical sensitivity of the system is 3×10-3mrad in phase and 3 in 105in reflectivity variation, both measured in a 1 kHz bandwidth. Preliminary measurements of film thickness and reflectivity variation are presented. This system also has potential applications for imaging objects with minute structural variations.

AB - A scanning optical profilometer is described which can simultaneously and independently measure the differential phase/amplitude variation of light reflected off an object surface. This information may then be interpreted as topographical and reflectivity variation of the object surface. The system is based on a heterodyne interferometer and uses two beams to probe the surface. The theoretical sensitivity of the system is 3×10-3mrad in phase and 3 in 105in reflectivity variation, both measured in a 1 kHz bandwidth. Preliminary measurements of film thickness and reflectivity variation are presented. This system also has potential applications for imaging objects with minute structural variations.

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U2 - 10.1063/1.100118

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Scanning differential optical profilometer for simultaneous measurement of amplitude and phase variation

Abstract

ASJC Scopus subject areas

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