Sacrificial removal of caps of aligned carbon nanotubes for interconnect application

Zhiyong Xiao, Yang Chai, Philip Ching Ho Chan, Baoqin Chen, Min Zhao, Ming Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

1 Citation (Scopus)

Abstract

Single-walled (SW) and multi-walled (MW) carbon nanotubes (CNTs) have excellent electrical, mechanical and thermal properties. They are considered as promising materials for future interconnect applications. MWCNTs are concentric rolls of graphene sheets. As-grown MWCNTs are typically close-ended, so the inner shells cannot be contacted to the metal electrodes and have limited contribution to the electrical conductance. Open-ended MWCNTs are preferred for interconnect applications to meet the conductance requirement. In this paper, a simple sacrificial process was developed to truncate CNTs. CNT vias were fabricated and a sacrificial process was employed to remove the CNT caps. Resistance of vias with open-ended and close-ended MWCNTs was measured using two-terminal voltage-current measurement. Via conductance was significantly increased after the MWCNTs in the vias were truncated to be openended using the sacrificial process.
Original languageEnglish
Title of host publication2009 Proceedings 59th Electronic Components and Technology Conference, ECTC 2009
Pages1811-1815
Number of pages5
DOIs
Publication statusPublished - 12 Oct 2009
Externally publishedYes
Event2009 59th Electronic Components and Technology Conference, ECTC 2009 - San Diego, CA, United States
Duration: 26 May 200929 May 2009

Conference

Conference2009 59th Electronic Components and Technology Conference, ECTC 2009
Country/TerritoryUnited States
CitySan Diego, CA
Period26/05/0929/05/09

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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