Abstract
Single-walled (SW) and multi-walled (MW) carbon nanotubes (CNTs) have excellent electrical, mechanical and thermal properties. They are considered as promising materials for future interconnect applications. MWCNTs are concentric rolls of graphene sheets. As-grown MWCNTs are typically close-ended, so the inner shells cannot be contacted to the metal electrodes and have limited contribution to the electrical conductance. Open-ended MWCNTs are preferred for interconnect applications to meet the conductance requirement. In this paper, a simple sacrificial process was developed to truncate CNTs. CNT vias were fabricated and a sacrificial process was employed to remove the CNT caps. Resistance of vias with open-ended and close-ended MWCNTs was measured using two-terminal voltage-current measurement. Via conductance was significantly increased after the MWCNTs in the vias were truncated to be openended using the sacrificial process.
Original language | English |
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Title of host publication | 2009 Proceedings 59th Electronic Components and Technology Conference, ECTC 2009 |
Pages | 1811-1815 |
Number of pages | 5 |
DOIs | |
Publication status | Published - 12 Oct 2009 |
Externally published | Yes |
Event | 2009 59th Electronic Components and Technology Conference, ECTC 2009 - San Diego, CA, United States Duration: 26 May 2009 → 29 May 2009 |
Conference
Conference | 2009 59th Electronic Components and Technology Conference, ECTC 2009 |
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Country/Territory | United States |
City | San Diego, CA |
Period | 26/05/09 → 29/05/09 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering