Rhombic-shaped thermal actuator array for evenly-distributed very large displacement

A. B. Yu; Xuming Zhang; H. Cai; Q. X. Zhang; A. Q. Liu

Rhombic-shaped thermal actuator array for evenly-distributed very large displacement

A. B. Yu, Xuming Zhang, H. Cai, Q. X. Zhang, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

3 Citations (Scopus)

Abstract

This paper presents a design of thermal actuator array to generate evenly-distributed displacement by cascading an array of rhombic-shaped units. Such design is implemented to a tunable grating to tune the period by 61% and to produce a total displacement of 215 μm. Such design is scalable to the sub-wavelength level, making its very attractive to many tunable nano-photonic devices.

Original language	English
Title of host publication	Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages	663-666
Number of pages	4
Publication status	Published - 1 Dec 2007
Externally published	Yes
Event	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: 21 Jan 2007 → 25 Jan 2007

Conference

Conference	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Country/Territory	Japan
City	Kobe
Period	21/01/07 → 25/01/07

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

@inproceedings{737a3816b2334a37a736470ec61a2058,

title = "Rhombic-shaped thermal actuator array for evenly-distributed very large displacement",

abstract = "This paper presents a design of thermal actuator array to generate evenly-distributed displacement by cascading an array of rhombic-shaped units. Such design is implemented to a tunable grating to tune the period by 61% and to produce a total displacement of 215 μm. Such design is scalable to the sub-wavelength level, making its very attractive to many tunable nano-photonic devices.",

author = "Yu, {A. B.} and Xuming Zhang and H. Cai and Zhang, {Q. X.} and Liu, {A. Q.}",

year = "2007",

month = dec,

day = "1",

language = "English",

isbn = "1424409519",

pages = "663--666",

booktitle = "Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007",

note = "20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 ; Conference date: 21-01-2007 Through 25-01-2007",

}

Yu, AB, Zhang, X, Cai, H, Zhang, QX & Liu, AQ 2007, Rhombic-shaped thermal actuator array for evenly-distributed very large displacement. in Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007., 4433084, pp. 663-666, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, 21/01/07.

Rhombic-shaped thermal actuator array for evenly-distributed very large displacement. / Yu, A. B.; Zhang, Xuming; Cai, H. et al.
Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. p. 663-666 4433084.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - Rhombic-shaped thermal actuator array for evenly-distributed very large displacement

AU - Yu, A. B.

AU - Zhang, Xuming

AU - Cai, H.

AU - Zhang, Q. X.

AU - Liu, A. Q.

PY - 2007/12/1

Y1 - 2007/12/1

N2 - This paper presents a design of thermal actuator array to generate evenly-distributed displacement by cascading an array of rhombic-shaped units. Such design is implemented to a tunable grating to tune the period by 61% and to produce a total displacement of 215 μm. Such design is scalable to the sub-wavelength level, making its very attractive to many tunable nano-photonic devices.

AB - This paper presents a design of thermal actuator array to generate evenly-distributed displacement by cascading an array of rhombic-shaped units. Such design is implemented to a tunable grating to tune the period by 61% and to produce a total displacement of 215 μm. Such design is scalable to the sub-wavelength level, making its very attractive to many tunable nano-photonic devices.

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M3 - Conference article published in proceeding or book

SN - 1424409519

SN - 9781424409518

SP - 663

EP - 666

BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007

T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007

Y2 - 21 January 2007 through 25 January 2007

ER -

Rhombic-shaped thermal actuator array for evenly-distributed very large displacement

Abstract

Conference

ASJC Scopus subject areas

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