Rhombic-shaped thermal actuator array for evenly-distributed very large displacement

A. B. Yu, Xuming Zhang, H. Cai, Q. X. Zhang, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

3 Citations (Scopus)

Abstract

This paper presents a design of thermal actuator array to generate evenly-distributed displacement by cascading an array of rhombic-shaped units. Such design is implemented to a tunable grating to tune the period by 61% and to produce a total displacement of 215 μm. Such design is scalable to the sub-wavelength level, making its very attractive to many tunable nano-photonic devices.
Original languageEnglish
Title of host publicationProceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages663-666
Number of pages4
Publication statusPublished - 1 Dec 2007
Externally publishedYes
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: 21 Jan 200725 Jan 2007

Conference

Conference20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
CountryJapan
CityKobe
Period21/01/0725/01/07

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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