Resonant Raman studies of tetrahedral amorphous carbon films

J. R. Shi, X. Shi, Z. Sun, Shu Ping Lau, B. K. Tay, H. S. Tan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

49 Citations (Scopus)


Resonant Raman scattering has been used to study the tetrahedral amorphous carbon films deposited by the filtered cathodic vacuum arc technique. The excitation wavelengths were 244, 488, 514 and 633 nm, corresponding to photon energies of 5.08, 2.54, 2.41 and 1.96 eV, respectively. In the visible Raman spectra only vibrational modes of sp2-bonded carbon (G and D peaks) are observed, while a wide peak (called the T peak) can be observed at approximately 1100 cm-1by UV-Raman spectra which is associated with the vibrational mode of sp3-bonded carbon. Both the position and the width of the G peak decrease almost linearly with increasing excitation wavelength, which is interpreted in terms of the selective π-π*resonant Raman scattering of sp2-bonded carbon clusters with various sizes. The G peak position in the UV-Raman spectra, the T peak position and the intensity ratios of ID/IGand IT/IGall exhibit maximum or minimum values at the carbon ion energy of 100 eV. The changes of these spectral parameters are discussed and correlated with the sp3fraction of carbon atoms in the films.
Original languageEnglish
Pages (from-to)76-81
Number of pages6
JournalDiamond and Related Materials
Issue number1
Publication statusPublished - 1 Jan 2001
Externally publishedYes


  • Raman spectroscopy
  • Tetrahedral amorphous carbon

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Materials Chemistry
  • Electrical and Electronic Engineering


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