Redundantly piezo-actuated XYθzcompliant mechanism for nano-positioning featuring simple kinematics, bi-directional motion and enlarged workspace

Wu Le Zhu, Zhiwei Zhu, Suet To, Qiang Liu, Bing Feng Ju, Xiaoqin Zhou

Research output: Journal article publicationJournal articleAcademic researchpeer-review

25 Citations (Scopus)

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