Redundantly piezo-actuated XYθzcompliant mechanism for nano-positioning featuring simple kinematics, bi-directional motion and enlarged workspace

Wu Le Zhu, Zhiwei Zhu, Suet To, Qiang Liu, Bing Feng Ju, Xiaoqin Zhou

Research output: Journal article publicationJournal articleAcademic researchpeer-review

11 Citations (Scopus)

Abstract

� 2016 IOP Publishing Ltd. This paper presents a novel redundantly piezo-actuated three-degree-of-freedom XYθzcompliant mechanism for nano-positioning, driven by four mirror-symmetrically configured piezoelectric actuators (PEAs). By means of differential motion principle, linearized kinematics and physically bi-directional motions in all the three directions are achieved. Meanwhile, the decoupled delivering of three-directional independent motions at the output end is accessible, and the essential parallel and mirror symmetric configuration guarantees large output stiffness, high natural frequencies, high accuracy as well as high structural compactness of the mechanism. Accurate kinematics analysis with consideration of input coupling indicates that the proposed redundantly actuated compliant mechanism can generate three-dimensional (3D) symmetric polyhedral workspace envelope with enlarged reachable workspace, as compared with the most common parallel XYθzmechanism driven by three PEAs. Keeping a high consistence with both analytical and numerical models, the experimental results show the working ranges of �6.21 μm and �12.41 μm in X- and Y-directions, and that of �873.2 μrad in θz-direction with nano-positioning capability can be realized. The superior performances and easily achievable structure well facilitate practical applications of the proposed XYθzcompliant mechanism in nano-positioning systems.
Original languageEnglish
Article number125002
JournalSmart Materials and Structures
Volume25
Issue number12
DOIs
Publication statusPublished - 10 Nov 2016

Keywords

  • enlarged workspace
  • finite element theory
  • flexible beams
  • nano-positioning stage
  • redundant actuation

ASJC Scopus subject areas

  • Signal Processing
  • Civil and Structural Engineering
  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Electrical and Electronic Engineering

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