Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers

Xuming Zhang; A. Q. Liu; J. Tamil; A. B. Yu; H. Cai; D. Y. Tang; Chao Lu

doi:10.1109/SENSOR.2007.4300414

Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers

Xuming Zhang
, A. Q. Liu
, J. Tamil
, A. B. Yu
, H. Cai
, D. Y. Tang
, Chao Lu

The Hong Kong Polytechnic University

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

2 Citations (Scopus)

Abstract

This paper presented the theoretical and experimental studies on a new mechanism of real pivot by use of a double-clamped beam. Comparison with the conventional virtual pivot formed by a cantilever beam, such real pivot provides large rotation angle and small position shift, which is key for the MEMS tunable lasers to obtain continuous wavelength tuning over a wide range. In experiment, the real pivot is able to produce a rotation angle of 4.7 degrees regardless of a depth variation of 16% over the double-clamped beam due to fabrication error. In contrast, the virtual pivot has only 2.4 degrees in the presence of 4% depth reduction. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust and allowable for single-chip integration.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1437-1440
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300414
Publication status	Published - 1 Dec 2007
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007

Conference

Conference	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	10/06/07 → 14/06/07

Keywords

External-cavity tunable lasers
MEMS
Micromechanics
Pivot
Rotary comb drive

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

More information

10.1109/SENSOR.2007.4300414

Cite this

@inproceedings{1f24dbbfd0cc4a45a21f36402e65b52a,

title = "Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers",

abstract = "This paper presented the theoretical and experimental studies on a new mechanism of real pivot by use of a double-clamped beam. Comparison with the conventional virtual pivot formed by a cantilever beam, such real pivot provides large rotation angle and small position shift, which is key for the MEMS tunable lasers to obtain continuous wavelength tuning over a wide range. In experiment, the real pivot is able to produce a rotation angle of 4.7 degrees regardless of a depth variation of 16\% over the double-clamped beam due to fabrication error. In contrast, the virtual pivot has only 2.4 degrees in the presence of 4\% depth reduction. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust and allowable for single-chip integration.",

keywords = "External-cavity tunable lasers, MEMS, Micromechanics, Pivot, Rotary comb drive",

author = "Xuming Zhang and Liu, \{A. Q.\} and J. Tamil and Yu, \{A. B.\} and H. Cai and Tang, \{D. Y.\} and Chao Lu",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/SENSOR.2007.4300414",

language = "English",

isbn = "1424408423",

pages = "1437--1440",

booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",

}

Zhang, X, Liu, AQ, Tamil, J, Yu, AB, Cai, H, Tang, DY & Lu, C 2007, Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300414, pp. 1437-1440, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300414

Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers. / Zhang, Xuming; Liu, A. Q.; Tamil, J. et al.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1437-1440 4300414.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers

AU - Zhang, Xuming

AU - Liu, A. Q.

AU - Tamil, J.

AU - Yu, A. B.

AU - Cai, H.

AU - Tang, D. Y.

AU - Lu, Chao

PY - 2007/12/1

Y1 - 2007/12/1

N2 - This paper presented the theoretical and experimental studies on a new mechanism of real pivot by use of a double-clamped beam. Comparison with the conventional virtual pivot formed by a cantilever beam, such real pivot provides large rotation angle and small position shift, which is key for the MEMS tunable lasers to obtain continuous wavelength tuning over a wide range. In experiment, the real pivot is able to produce a rotation angle of 4.7 degrees regardless of a depth variation of 16% over the double-clamped beam due to fabrication error. In contrast, the virtual pivot has only 2.4 degrees in the presence of 4% depth reduction. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust and allowable for single-chip integration.

AB - This paper presented the theoretical and experimental studies on a new mechanism of real pivot by use of a double-clamped beam. Comparison with the conventional virtual pivot formed by a cantilever beam, such real pivot provides large rotation angle and small position shift, which is key for the MEMS tunable lasers to obtain continuous wavelength tuning over a wide range. In experiment, the real pivot is able to produce a rotation angle of 4.7 degrees regardless of a depth variation of 16% over the double-clamped beam due to fabrication error. In contrast, the virtual pivot has only 2.4 degrees in the presence of 4% depth reduction. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust and allowable for single-chip integration.

KW - External-cavity tunable lasers

KW - MEMS

KW - Micromechanics

KW - Pivot

KW - Rotary comb drive

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M3 - Conference article published in proceeding or book

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SP - 1437

EP - 1440

BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07

Y2 - 10 June 2007 through 14 June 2007

ER -

Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers

Abstract

Conference

Keywords

ASJC Scopus subject areas

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