Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers

Xuming Zhang; A. Q. Liu; J. Tamil; A. B. Yu; H. Cai; D. Y. Tang; Chao Lu

doi:10.1109/SENSOR.2007.4300414

Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers

Xuming Zhang, A. Q. Liu, J. Tamil, A. B. Yu, H. Cai, D. Y. Tang, Chao Lu

The Hong Kong Polytechnic University

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

2 Citations (Scopus)

Abstract

This paper presented the theoretical and experimental studies on a new mechanism of real pivot by use of a double-clamped beam. Comparison with the conventional virtual pivot formed by a cantilever beam, such real pivot provides large rotation angle and small position shift, which is key for the MEMS tunable lasers to obtain continuous wavelength tuning over a wide range. In experiment, the real pivot is able to produce a rotation angle of 4.7 degrees regardless of a depth variation of 16% over the double-clamped beam due to fabrication error. In contrast, the virtual pivot has only 2.4 degrees in the presence of 4% depth reduction. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust and allowable for single-chip integration.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1437-1440
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300414
Publication status	Published - 1 Dec 2007
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007

Conference

Conference	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	10/06/07 → 14/06/07

Keywords

External-cavity tunable lasers
MEMS
Micromechanics
Pivot
Rotary comb drive

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

More information

10.1109/SENSOR.2007.4300414

Cite this

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title = "Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers",

abstract = "This paper presented the theoretical and experimental studies on a new mechanism of real pivot by use of a double-clamped beam. Comparison with the conventional virtual pivot formed by a cantilever beam, such real pivot provides large rotation angle and small position shift, which is key for the MEMS tunable lasers to obtain continuous wavelength tuning over a wide range. In experiment, the real pivot is able to produce a rotation angle of 4.7 degrees regardless of a depth variation of 16% over the double-clamped beam due to fabrication error. In contrast, the virtual pivot has only 2.4 degrees in the presence of 4% depth reduction. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust and allowable for single-chip integration.",

keywords = "External-cavity tunable lasers, MEMS, Micromechanics, Pivot, Rotary comb drive",

author = "Xuming Zhang and Liu, {A. Q.} and J. Tamil and Yu, {A. B.} and H. Cai and Tang, {D. Y.} and Chao Lu",

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Zhang, X, Liu, AQ, Tamil, J, Yu, AB, Cai, H, Tang, DY & Lu, C 2007, Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300414, pp. 1437-1440, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300414

Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers. / Zhang, Xuming; Liu, A. Q.; Tamil, J. et al.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1437-1440 4300414.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Liu, A. Q.

AU - Tamil, J.

AU - Yu, A. B.

AU - Cai, H.

AU - Tang, D. Y.

AU - Lu, Chao

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N2 - This paper presented the theoretical and experimental studies on a new mechanism of real pivot by use of a double-clamped beam. Comparison with the conventional virtual pivot formed by a cantilever beam, such real pivot provides large rotation angle and small position shift, which is key for the MEMS tunable lasers to obtain continuous wavelength tuning over a wide range. In experiment, the real pivot is able to produce a rotation angle of 4.7 degrees regardless of a depth variation of 16% over the double-clamped beam due to fabrication error. In contrast, the virtual pivot has only 2.4 degrees in the presence of 4% depth reduction. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust and allowable for single-chip integration.

AB - This paper presented the theoretical and experimental studies on a new mechanism of real pivot by use of a double-clamped beam. Comparison with the conventional virtual pivot formed by a cantilever beam, such real pivot provides large rotation angle and small position shift, which is key for the MEMS tunable lasers to obtain continuous wavelength tuning over a wide range. In experiment, the real pivot is able to produce a rotation angle of 4.7 degrees regardless of a depth variation of 16% over the double-clamped beam due to fabrication error. In contrast, the virtual pivot has only 2.4 degrees in the presence of 4% depth reduction. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust and allowable for single-chip integration.

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Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers

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Conference

Keywords

ASJC Scopus subject areas

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