Real pivot mechanism of rotary comb-drive actuators for MEMS continuously tunable lasers

Xuming Zhang, A. Q. Liu, J. Tamil, A. B. Yu, H. Cai, D. Y. Tang, Chao Lu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

2 Citations (Scopus)

Abstract

This paper presented the theoretical and experimental studies on a new mechanism of real pivot by use of a double-clamped beam. Comparison with the conventional virtual pivot formed by a cantilever beam, such real pivot provides large rotation angle and small position shift, which is key for the MEMS tunable lasers to obtain continuous wavelength tuning over a wide range. In experiment, the real pivot is able to produce a rotation angle of 4.7 degrees regardless of a depth variation of 16% over the double-clamped beam due to fabrication error. In contrast, the virtual pivot has only 2.4 degrees in the presence of 4% depth reduction. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust and allowable for single-chip integration.
Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1437-1440
Number of pages4
DOIs
Publication statusPublished - 1 Dec 2007
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 10 Jun 200714 Jun 2007

Conference

Conference4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period10/06/0714/06/07

Keywords

  • External-cavity tunable lasers
  • MEMS
  • Micromechanics
  • Pivot
  • Rotary comb drive

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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